Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Possible to transfer a workpiece at low-speed.

20 30 40 Size 20 30 40 The figure shows the view from the long shaft end.

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

Table of Contents

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 m Me L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 L8 Wall 1000 1000 Y 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000

Table of Contents

BG F 1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature Body size Body size For high pressure 25 30 40 50 60 20 25 30 40 50 60 X430 X440 Low temperature High temperature Thread type Thread type Rc NPT G Rc NPT G Nil N F Nil N F Port size Port size Body size Port size Body size Symbol Port size Symbol 25 30 40 50 60 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04

Environment

40 30 20 10 Step 1 Check the speedwork load.

ZP

S U F GN GS 20 108.5 58.5 50 20 25 36 15.5 12.5 12 30 118.5 68.5 50 163.5 88.5 75 J K ZP T F Width across flats L 2 12 3 10 99 49 16.5 20 109 59 Width across flats M 36.5 16 13 50 32 D C 12 30 119 69 50 164 89 75 Rc1/8 B01 N01 T01 A14 M14 NPT1/8 19 4 12 13 10 101.5 51.5 x 1 16.5 20 111.5 61.5 E NPTF1/8 50 40 Width across flats N F2 39 18.5 12.5 12 30 121.5 71.5 50 166.5 91.5 75 30 2.5 19

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications

CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 12.02621 lb

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.JIS standard compact hydraulic cylinder, Nominal pressure: 10MPa, Bore sizes: 20~25, Mounting: basic type, Auto switch capable, CYL, H/PRESS HYDRA

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.JIS standard compact hydraulic cylinder, Nominal pressure: 10MPa, Bore sizes: 20~25, Mounting: basic type, Auto switch capable, CYL, H/PRESS HYDRA

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 13.22773 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 13.37471 lb

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.JIS standard compact hydraulic cylinder, Nominal pressure: 10MPa, Bore sizes: 20~25, Mounting: basic type, Auto switch capable, CYL, H/PRESS HYDRA

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 15.06491 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 10.80265 lb

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.JIS standard compact hydraulic cylinder, Nominal pressure: 10MPa, Bore sizes: 20~25, Mounting: basic type, Auto switch capable, CYL, H/PRESS HYDRA

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, H/PRESS HYDRA 10MPA, A-SW, OTHERS, CH HYDRAULIC CYLINDER, RE, 80MM CH DBL-ACT AUTO-SW, 10.09202 lb