SMC Pneumatic Clean Series

V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

CHKD/CHKG

Hydraulic fluid Compatibility Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible O/W hydraulic fluid Compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Not compatible Consult with SMC. 265 A CHKD Series Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 10 3.5 7 314 3140 1099 2198

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

MXH Series Compact Slide

B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

W 3 port normally open SOL.C 7.

CXS

7 Piston rod A Piston seal w Note) Hard chromium electroplated Carbon steel NBR !8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

CXS

7 Piston rod A Piston seal w Note) Hard chromium electroplated Carbon steel NBR !8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

SMC Pneumatic Clean Series

Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.

Low Profile Guide Type

W L In case the product is installed on the ceiling, regard the mounting bolt pitch as L. W L Mounting hole W Intermediate support mounting hole L L Distance between Load and Supports Mounting hole 140 130 25 120 CY3B CY3R 110 100 CY1S 90 4. When a 25 mm adjustment bolt is selected, the mounting holes will be hidden behind it. Adjust the adjustment bolt after the cylinder is installed.

RQ

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Basic Style A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5 17 M6 x

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Pin Clamp Cylinders

Height: 30 mm (LOW type), 100 mm (HIGH type) W H L2 T L1 [mm] Model C(L)KQG32 Compact cylinder type (Guide pin diameter: 12) C(L)KU32 Plate cylinder type (Guide pin diameter: 12) C(L)KQG50 (Guide pin diameter: 13) Clamping height LOW type HIGH type LOW type HIGH type LOW type HIGH type Clamping height H 30 100 30 100 24 54 Body thickness T 50 29 66 Body width W 50 70 66 Body length L1 127

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

MXU

Note 3) ( ) in column W is the dimensions of D-A93.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Brake mechanism added

Handling Technical Material Be sure to read before handling brake positioning system (CE2 + CEU2). 682 CE2 Series Prior to Use Example of Recommended Pneumatic Circuit Horizontal mounting Vertical flat mounting Vertical overhead mounting W W CEP1 CE1 CE2 CE2 ML2B W Note) In the case of light load, regulate head side supply pressure.

Round Type Hydraulic Cylinder

1 u t w y CHK CHN CHM CHM CHS CH2 o !

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Compact Hydraulic Cylinder Double Acting/Double Rod Series CHQWB 20, 32, 40, 50, 63, 80, 100 3.5MPa How to Order B B 50 30 D CHQ CHDQ 50 30 A72 D W W With Auto Switch With auto switch (built-in magnet) Number of auto switches 2 pcs. 1 pc. "n" pcs.

Compact End Lock Cylinder Series CBQ2

Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W

ZCUK

Note 4) Figures in ( ) in the table W are D-A93.