SMC Pneumatic Clean Series Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 10 R E C L 25 150 M9BW C Number of auto switches Mounting Nil S n B L F G 2 pcs. 1 pc. n pcs.
7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !
3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !
7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.
3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.
JIS Standard Hydraulic Cylinder Double Acting/Single Rod 32, 40, 50, 63, 80, 100 CH2E/CH2F/CH2G/CH2H Series 3.5 MPa 7 MPa 14 MPa How to Order Rod size series Series type Cylinder stroke (mm) B C B-series rod size C-series rod size Tubing material Aluminum alloy Stainless steel Steel Stainless steel Symbol E F G H Nominal pressure 3.5 MPa 7 MPa 14 MPa 14 MPa Refer to the standard stroke table
-XC11 Dualstrokecylinder/Singlerodtype -XC12 Tandem cylinder*1 -XC13 Autoswitchrailmounting -XC20 Headcoveraxialport -XC22 Fluororubberseal -XC25 Nofixedthrottleofconnectionport*1 Pivot bracket * PivotbracketisavailableonlyforC,T,U,E, V,UZmountingtypes. * Nobracketisprovidedforthefemalerodend.
9 >@0 &' 3+ &@> -1 , E+ > 3 :! , G+ % !+ L+ * ;* !+ 2 M+ * ;* !+ 2 MN+ * WO+ * )( )( 9 >@0 ( ) Light/Surge voltage suppressor ) ( Nil S Z R U * !@ ! -! * ! -! * !@ ! -! * ! -! ;= ,2 H+ % !+ LN+ * LO+ * MO+ * W+ * * !@ ! -! ;= ,2 E # ! -! , C.D 9 G+ , * !, -! + , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !
Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm
9 #4 #5 #1 MXS MXQ @7 @8 t @9 @4 @4 @4 MXF MXW MXJ Metal stopper Shock absorber e !8 A MXP i !1 !0 @6 o @0 MXY MTS !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No. Description No.
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.
B Basic E Double-side bossed D Double clevis L Single foot M Double foot F Rod ange G Head ange 10 10 mm 16 16 mm REC Rod end bracket Nil None V Single knuckle joint W Double knuckle joint T Rod end cap (Flat type) U Rod end cap (Round type) Smooth Smooth Low Speed * Foot bracket and ange bracket are shipped together with the product, but not assembled.
Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.
L = Stroke 1 2 , or more than 100 mm 1 7 5 4 6 2 6 5 7 3 L L Fig. 11 Position for application of grease Table 10 Amount of grease units: g Stroke 32 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1 1.5 2 3 26 3-2-4.
L 100mm, or stroke 1 2 Grease on the outer circumference Grease in the groove Rod seal part Approx. 3g A little less than 1cm Amount of grease Fig. 8 Position for application of grease Table 8 Amount of grease units: g Stroke 20 25 32 40 P o s i t i o n f o r Bore size g r e a s e At 100st 2 3 3 3 to 4 ( 1 ) , ( 2 ) , ( 3 ) , ( 4 ) , ( 5 ) , ( 6 ) 50st added 0.5 0.5 0.5 1 ( 5 ) , ( 6 )
.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.
L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.
Bolt interferes with speed controller 712 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Construction Closed condition r e @1 @0 !2 !6 !4 o t !8 i !9 !0 !7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.
Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW