Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band Band

e

400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3 2 2 2 1 1 100

VZ5000

Locking type C (Manual) Grommet L plug connector M plug connector DIN terminal L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D: With connector G: Lead wire length 300 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector H: Lead wire length 600 mm Light/Surge voltage suppressor Nil None Z With light/surge voltage

CL

Part no. l Applicable snap ring t m 16.2 20.2 36.2 1.5 1.55 1.55 0.9 1.15 1.15 Type C 8 for axis Type C 10 for axis Type C 10 for axis IY-G02 IY-G03 IY-G04 CD-G02 CD-G25 CD-G03 CD-G04 Type C 8 for axis Type C 10 for axis Type C 12 for axis Type C 14 for axis 38.6 42.6 54 65 1.5 1.55 1.55 2.05 0.9 1.15 1.15 1.15 9-2-34

Electric Actuator / Low profile slider type

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF -21- Step No. 1: Positioning operation a b c d e f g h i j k [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

Air Slide Table Series MXW

65 80 690 7 163 134 1 MXW25-300 232 395 245 320 60 52 60 740 8 188 159 2 165 Series MXW Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90 (V), D-A93 (V), D-A96 (V) Stroke (mm) Model 300 250 275 50 75 100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

MU

3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27

Thermo-chiller/Rack Mount Type

Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating

Large Size Vacuum Module: Series ZR

for vacuum (ZSE2) + Filter Filter Caution ZL D Lead wire specifications Digital pressure switch for vacuum (ZSE30A) specifications (D) E F 1.

3 Port Solenoid Valve

If the mounted valve is N.O., apply pressure to the 3(E) port and exhaust air from the 1(P) port. 4 Series VV100 3 Port Solenoid Valve/D-sub Connector Connector Type Manifold Plug-in How to Order Valve for Connector Type Standard V1 1 U 0 C4 T D 5 C D 1 C Z J 0 C4 5 With switch V1 Individual wiring [For plug-in mixed mounting] T D Note) See page 13 for the dedicated non plug-in individual

CQS

, D-F9WV D-M9, D-F9W D-M9V D-A9V D-F9BAL CQ2 No. of auto switches mounted 1.

VM

E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Note 4) When specifying more than one option,indicate them alphabetically. 2.10-31 VQZ100/200/300 Base Mounted How to Order Manifold VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) External pilot specification D DO R Manifold type 5 Base mounted Kit Order DIN rail separately.

MXQ

Retraction End E1 D E H H F G B J C A K MXQ-BT20(L) MXQ-BT25(L) MXQ-BT8(L) MXQ-BT12(L) MXQ-BT16(L) (mm) Stroke adjustment range (mm) Applicable size A B C E1 G H J K 1) E D F Model MXQ8(L) MXQ-BT8(L) M8 x 1 M3 x 8 5 40.8 14 12.5 1.4 24.5 12 20 23 8 MXQ12(L) MXQ-BT12(L) M8 x 1 M4 x 10 6 40.8 16 16 1.4 29 12 18 28 10 MXQ16(L) MXQ-BT16(L) M10 x 1 M5 x 12 7 46.7 17 20 1.4 35.5 14 22 33.5 12 MXQ20

20

Outside diameter Nozzle size L2 Note1) D L1 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 1.5 2 1.5 2 1.5 2 1.5 2 2.5

New

z300 Q F D z 300 Q F C R E C R E A B1 B1 A B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm

Series VQ Metal Seal/Rubber Seal Body Ported

450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2 (0.90) VQ2001 (Rubber seal) 1.10-6 VQ0 Body Ported Plug Lead Unit/Flip Style How to Order Manifold VV5Q 0 D S1 F 4 08 Series Option None (C kit only) DIN rail mounting Special wiring specification (Not double wiring) VQ0 0 Manifold Plug lead unit/Flip D K N S 4 (2) (3) With name plate Built-in silencer (Direct exhaust

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)