SMC Corporation of America
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D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

Dimensions [Separately installed power transformer] C E IDF-TR7000-8 G B D 4 x F A Specications/Dimensions in (mm) Transformer Applicable dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight 14.2 (360) 21.3 (540) 15.7 (400) 10.2 (260) 11.8 (300) 0.43 (11) 1.18 (30) 207 lb (94 kg) IDF-TR7000-8 IDF100FS 7 kVA Three-phase Compound winding 220, 240 380, 400, 415 440 V (50/60

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D. Therefore, there is no time loss associated with the pressure transmission lag indicated by the line from C to E, as in the case of meter-in control that is effected through the use of a speed controller.

Indicator 45 22.5 27 1/8 Pilot port 5 17 D E OUT IN E C B 2 x P Port size A A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 VXB Series For Steam Replacement Parts How to order the maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT *

L L+A Fig. 1 Fig. 2 L 2 1 V E = W ( ) 2 1000 Collision speed V = 1.4 Va Find the kinetic energy E (J) of the load. 1 420 E = 1 ( ) = 0.088 2 1000 V = 1.4 x 300 = 420 Correction factor (reference value) Find the allowable kinetic energy Ea (J).

4-counter bore B T T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2

Open knobs C and E gradually until the required speed is achieved. Make sure that knobs C and E are opened by the same number of rotations. Note 1) If the piston rod jerks, close knob E until the smooth operation is achieved. 3. Speed adjustment for return stroke The speed is adjusted with the flow valve. Open knob D gradually until the required speed is achieved. 4.

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

(for 2000 L/min) 50 50 50 Supply pressure 200 kPa Supply pressure 400 kPa Supply pressure 200 kPa Supply pressure 400 kPa 40 40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight

500 100 200 300 400 600 500 100 200 300 400 600 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 142 Long Stroke Slide Table MXW Series Construction / Parts List Packing List 5 3 4 6 17 18 15 2 1 21 10 16 19 8 7 9 20 12 13 11 14 Parts List Note Material No.

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

10VA 5W AC1500V1 AC500V 1 DC500V50 0+50 3585RH 1500V600V Hz 2 10G XYZ 3 250g 6 6 6 6 6 6 6 6-1 1 1 1 (DC12V60mA) B A G N D A B COM RS COM COM 12V G N D A B COM OUT1 AC100V OUT2 COM COM OUT3 COM DC24V GND AC100V (C E U 1) (C E U 1-D ) CEU1 +12V + 12V 1 A 680 CO M +12V + 12V 1 B 680 COM +12V D C 1 2 V60 m A GND RS COM FG AC100V 6 6 6 6-3 3 3 3 1C E U 1 CE1-R**

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Determination of loads kinetic energy (E) bore size Determination of bore size Review of larger bore size E Es E Es E = m E 2 a ( ) 2 (Refer to page 29) 1000 P Ps P Ps Determination of pressure for intermediate stop (p) (Refer to page 29) Review of larger bore size and operating pressure Model determination 1 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F Types

Eliminate the unnecessary parts. 1.10-13 Series CS1 Front Flange/CS1F Lube (CS1F), Non-lube (CS1FN), AIr-hydro (CS1FH) Long stroke With auto switch/CDS1F (mm) Stroke range (mm) W/o rod boot With rod boot Style Bore (mm) J FT FX FD S AL B E F FA KA M MM H A D EA FY FZ G K N P B C h ZZ e f l ZZ1 125 140 160 180 200 250 300 115 1/2 M30 X 1.5 145 75 40 145 190 100 230 M14 X 1.5 110 238 133 261