MGP

Stroke (mm) Bore size (mm) Bearing 25 50 75 100 125 150 175 200 16 20 25 32 40 50 63 80 100 U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U Built-in cushion valve inside the body U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U U MGPM Slide bearing MGPL Ball bushing bearing Oversized Guide Rod Series MGPS 50, 80 Improved Load Resistance Oversized Guide Rod

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

CQ2

B A B A B A B A B A B A B U U U U U U U U U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 9 10 (4.5) 12 19.5 20.5 26.5 23 26 22 7.5 (5.5) 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 12 (10) 9.5 16 22.5 23.5 29.5 26 29 25 (11.5) 20 25 32 40 50 24.5 25.5 31.5 28 31 27 4 7.5 8 7 11 12 6.5 5 27.5 28.5 34.5 31 34 30 11.5 4.5 7.5 8 7.5 12 7 5 31.5 32.5 38.5 35 38 34 27 29 26.5 8 13.5 12 11 10.5 3.5 9 9.5 6.5 8 9

SX

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

Modular Design with Uniform Body Style

drain cock C2SL-36-A With bowl guard C2SL-36C-A C3SL-36-A C4SL-36-A Nylon Drain cock with barb fitting With bowl guard C3SL-36W-A C4SL-36W-A Metal Without drain cock C2SL-2-A C3SL-2-A C4SL-2-A With level gauge C3LL-8-A C4LL-8-A With drain cock C2SL-23-A C3SL-23-A C4SL-23-A With level gauge C3LL-38-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

SV

118 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300--.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

U D 5 3 U D 5 3 Individual EXH block assembly Individual SUP block assembly X U side D side U side D side X X 1(P) 1(P) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 1(P) 3/5(R) 3/5(R) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) 4(A) 2(B) [When a different supply pressure is required for only a middle valve.]

Table of Contents

4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Table of Contents

F A F u Pilot solenoid valve SF4--23 (Refer to the table below.)

VQ5000

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) A 4 B 2 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

Table of Contents

7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

ZP3

C thread N S U F GN GS Width across flats B 02 13 5.5 2 KQ2H02-M3G ZP3 Y 015 02 035 U B3 1.2 Vacuum inlet 04 14.5 8 4 KQ2H04-M3G Dimensions Per Vacuum Inlet: Barb Fitting Model A A B Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side Station No. 9 9 Electrical entry on U side (LU) 19 34.5 n 12 X 2n-3/8, 1/2 (ports A, B ) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC Cable length A B B B B B Manual override B 2 A 4 A B 4 A B 2 A 4 L2 L1 58.5 P=41 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P=41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 Electrical entry on D side (LD) 17 107.8 D side 22 179 (single, double, 3

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U U U U U U U A B A B A B A B A B A B U 4.5 5.5 (10) 5 6 (10.5) 2 3 (7.5) 12 22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5

Vacuum Pad

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Electric Actuator/Slider Type

3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

V100

(A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No. Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. q w e r t y Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Description Note Part no.

High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

7

4 u u VX2 i i VXK !0 !2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !