Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/8 1/8 1/4 1/4 1/4 3/8 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 37 44 50 56 66 8-25-11 11 Series MGZ With Mounting Bracket Transaxial foot style: (L) 4-LD through LT LH LY X/2 ZZ + Stroke LS + Stroke X X Y LZ LX (mm) Stroke range Bore size (mm) LS ZZ LD Y X LH LT LX LY LZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

MTS MY Side support B MY-SB CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J CX E DB A C D -X (mm) 20B A 53 77 112 160 C 15 35 45 55 D 26 50 64 80 E 4.9 8 11.7 14.8 F 3 5 6 8.5 G 6.5 9.5 11 14 H 3.4 5.5 6.6 9 J M4 x 0.7 M6 x 1 M8 x 1.25 M10 x 1.5 Model Applicable

Series IDG

0.7MPa 20 20 30 30 40 40 50 50 600 0 200 400 800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: S (1 pc.), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Slider Type Ball Screw Drive/11-LEFS Series

0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

S070

-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With sub-plate S070 B 5 B G Base mounted S070 C 5 B G 32 Body ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Manifold 2 Body ported Stations Kit type 2 stations 02 C Connector 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com How to Order Valves: VQZ200/300 VQZ 1 2 2 5 M Port size {2(A) port} Series VQZ200 VQZ300 Port size Symbol 2 3 VQZ200 Body width 15 mm

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

LEF-OM006xx

* LECA6 LECA6 PNP PNP 3 00 mm 300 300 AP * AP * 2000 2000 2000 mm B 8m 8 8 B 10m 1.5 m 1 1 A A 15m m 3m 3 3m 3 B B 20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

CJ2X/CUX/CQSX/CQ2X/CM2X

C J G5-S CV Maintenance Snap Ring Installation/Removal Caution Caution MVGQ 1. For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2.

Round Type Hydraulic Cylinder

54 10 48 7.5 19 44 24 21 1/4 22.5 108 20 182 204.5 322 Round Type Hydraulic Cylinder: 3.5 MPa CHM Series Accessories (Standard) Rod end nut Mounting nut 30 30 d d CHQ C D D C CHK H B B H Material: Carbon steel Material: Carbon steel CHN Part no. d H B C D Applicable bore size (mm) NT-02 NT-03 NT-04 AC-NI-50 Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 CHM CHM 8 8 9