STANDARD (PT), .03797 lb, ModelTubing O.D.Controlled flow(Free flow)Metric sizeInch sizeFlow rate l /min (ANR){N R/min}Effective area (mm2)ASD230F?

sizeFlow rate l /min (ANR){N R/min}Effective area (mm2)ASD230F?

STANDARD (PT), .04409 lb, ModelTubing O.D.Controlled flow(Free flow)Metric sizeInch sizeFlow rate l /min (ANR){N R/min}Effective area (mm2)ASD230F?

rate l /min (ANR){N R/min}Effective area (mm2)ASD230F?

rate l /min (ANR){N R/min}Effective area (mm2)ASD230F?

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

Process Valve Series VNA

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) K (Terminal with indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (Grommet: G) G (Air operated) Main port (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Note) K L M

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

-fl Seies

j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s !

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s !

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Made to Order Refer to page 622 for details. Applicable tubing O.D.

AS

Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Flat washer Hexagon nut AS1002F-02 AS1002F-23 AS1002F-04 AS1002F-06 AS2002F-04 AS2002F-06 AS2052F-06 AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

21- AF-A 10- Series Air Filter

Air Filter Series 1021AF-A How to Order * "J" must always be selected. Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 BT-06 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order Refer to page 622 for details. Applicable tubing O.D.