Vacuum Pad

A B D Weight [g] ZP3P-T25PTSFK10-B5 33 69 23 28.5 ZP3P-T25PTSFK20-B5 43 107 51 42.2 ZP3P-T35PTSFJM-B01 ZP3P-T35PTSFKM-B01 ZP3P-T35PTSFJ10-B01 ZP3P-T35PTSFK10-B01 ZP3P-T35PTSFK20-B01 ZP3P-T35PTSFJ20-B01 Width across flats 13 Rc1/8 Width across flats 13 Width across flats 13 Rc1/8 Width across flats 13 K: Non-rotating D-D J: Rotating D-D B B Width across flats 19 Width across flats 19 D D D

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

CXS

side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3 5 X (

Basic Type/Direct Mount Type

A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x

C95Series

. __ I -='.1' .J.. ~ ~ _.

Air Slide Table Series MXW

20 MXH 10 MXU Width across flats 13 Note) If long bolts are used, they can touch the guide block and cause malfunction, etc.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

MXW Series Long Stroke Slide Table

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

IIIIIII

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

Mechanical Valves Series NVM, NVFM, NVZNI

2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Rotary Actuator/Vane Style Series CRB1

X, Z CRBU2 K, T J K Z J CRB1 K K MSU CRJ XA38 XA39 XA40 XA41 XA45 XA46 K, T K CRA1 K K J J K J K K CRQ2 Y Y MSQ K, T K, T S K K J J MSZ X, Z X, Z T J, Z CRQ2X MSQX Z J MRQ J Reversed shaft, Change of double shaft length (With four chamfers, without keyway) Reversed shaft, Change of shaft length (With four chamfers) Reversed shaft, Change of shaft length (With keyway) X Combinations

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact Manifold Regulator Series ARM5

Handle Position Symbol Position Handle position Handle position Handle position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max. 28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 6 51.5 80 51.5 13 OUT IN 3 28 13 OUT IN 13 OUT IN 3 3 2. OUT Piping Position 3.

Air Slide Table Series MXP

MXP12 9.8 17 4.5 13 26 41 12 28 MXP16 Symbol Symbol An (n = 1 to 3) E Emax Ln (n = 1 to 3) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) Unit mm J J mm Nm Nm Nm Nm Nm Definition Correction values of moment center position distance Kinetic energy Allowable kinetic energy Overhang Static moment (pitch, yaw, roll) Allowable static moment

Compressed Air Preparation Filter

With bowl guard C2SFm-CJ-D C3SFm-J-D C4SFm-J-D Polycarbonate, Stainless steel Normally closed (N.C.)

CRQ2

Refer to pages 11-13-3 to 11-13-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 11-1-6 for Precautions on every series. Caution The angle adjustment bolt is set at random within the adjustable rotating range.

Electric Actuators

Dimensions [mm] Model L1 L2 L3 A B C D E F G J 127.1 LEPS6m-25m 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6m-50m 156.6 169.6 13 22 45 30 52 22 52 60 107.4 18 Series LEPS Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1 Motor cable length 300

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

12 10 80 156 312 36 112 106 162 16 13 100 170 340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 111 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Front trunnion type: CHAWU Z T T Cushion adjustment screw 2-Rc P Width across flats G TT GA Air release GA M Width across flats G 4-J V V MM MM R (max.)

AIR COMBINATION

H J H J H J B B B 77.9 AC10A-A 26 26 59.3 AC20A-B 28 27 27.8 37.5 37.5 62.5 37.5 63.5 91.4 87.4 104.9 93.9 AC30A-B 28 30 27.8 40.9 37.5 66.9 37.5 67.9 123.6 122 118 156.8 122.1 137.6 142.1 AC40A-B 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 155.6 154 150 186.9 154.1 169.6 174.1 AC40A-06-B 28 38.4 27.8 48.8 42.5 75.7 42.5 75.7 157.6 156 152 188.9 156.1 171.6 176.1 AC50A-B 28 44.3 27.8