Mechanical Valves Series NVM, NVFM, NVZNI

't.20 f30.51 o.24 (6) Millimeters in Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5

10

With surge voltage suppressor 4 N 100 VAC 3/8 7 P 110 VAC A B C D E F G H J K L M N P 5 Q Size 3 3 200 VAC N.C. 1/4 8 R 230 VAC 10 (N.C. only) 6 N.O.

NCQ8

Nil S n 2 pcs. 1 pc. n pcs.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

Air Cylinder

Mounting B MX0 Basic L MS1 Foot F MF1 Front Flange G MF2 Rear Flange R MS4 Side Tapped D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Bore Size 150 200 250 325 400 1.5" 2" 2.5" 3.25" 4" Nil S n Nil J K No. of Switches 2 Pieces 1 Piece "n" Pieces For larger bore

Electric Actuator

Motor Servo Motor (24 VDC) Controller Controller E ProgramlessType E AC Servo Motor Controller E Step Data InputType New New New New New New Series LECSA/LECSB Series LECP6/LECA6 Series LECP1 N Pulse input type N Absolute encoder (LECSB) N Built-in positioning function (LECSA) N 64 positioning points N Teaching box, controller setting kit input N 14 positioning points N Control panel setting

Programless controller Step motor (servo 24 VDC)

Pushing speed is fixed at 20 mm/s for LESH**J and at 10 mm/s for LESH**K. LES8 / LESH8 LES16 / LESH16 LES25 / LESH25 J K J K J K Low 4 6 15 23.5 43 77 Pushing force [N] Middle 7 10.5 25 39 71.5 128.5 High 10 15 35 55 100 180 Pushing force accuracy is 20%F.S. Refer to the operation manual of the electric actuator for details.

C85

Lubrication 50 to 1500 mm/s Piston speed 0.02 J 0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Allowable kinetic energy Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' 0/+1.4 0/+1 Stroke tolerance (mm) Non-rotating Spring Retracting Force (Standard, Non-rotating) JIS Symbol Standard Spring Return (N) Spring force Bore size (mm) Standard stroke (mm) 10 25 50 100 150 Retract Extended Retract Extended

C85

J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.

5 Port Solenoid Valve

When ordering this option incorporated with a manifold, suffix -N to the end of the manifold part number. ...n: Station 5 8 7 6 5 4 3 2 1 31 n = 6 to 24 n = 1 to 5 72 Series S0700 Plug-in Manifold Stacking Base Manifold Optional Parts Double check block (Separated) VQ1000-FPG-ll It is used on the outlet side piping to keep the cylinder in the intermediate position

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

Modular Type Regulators Series AR

T Bracket (Option) J 2 x P1 (Port size) AR50(K), AR60(K) A Q C B K IN OUT F R S P2 (Pressure gauge port size) U M J T N D Bracket (Option) Applicable model AR20(K) to AR60(K) AR10, AR20(K) to AR60(K) Round type pressure gauge (with color zone) AR20(K) to AR60(K) Digital pressure switch Square embedded type pressure gauge Option Round type pressure gauge J J J H H H Center of piping Center

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(J) 100 12 16 20 25 32 40 50 63 80 Bore size (mm) 200 CQS Standard 2.27 0.022 0.038 0.055 0.09 0.15 0.26 0.46 0.77 1.36 100 Allowable kinetic energy: Ea CQM With rubber bumper 4.54 0.043 0.075 0.110 0.18 0.29 0.52 0.91 1.54 2.71 50 40 30 100 Allowable kinetic energy: Eb CQ2 Allowable lateral load for rod end (N) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

0.4

A combination of J and N is not available. Note 6) Specify the wiring specifications by means of the manifold specification sheet. Note 7) Indicate R for the valve with external pilot. Note 8) G1, G2, or G3 cannot be combined with N.

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Pilot Operated

B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5 75 75 Normally closed VXD2272 VXD2382 VXD2392 Normally open VXD2270

ML2B

K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32

ML2B

K M 9 N K M 1 RE A B O 1 H REC O H PP CX NN NN MM MM CY KK LL KK LL 2-PA J J MQQ M 2-PA (Port for operating cylinder) (Port for operating cylinder) F I F RHC (mm) (mm) MK(2) M 30.5 32 41.5 K 46 58 68 J 40 46.5 55 I 76.5 91 110 N 16 15 19 H 73 88 106 F 93.5 107.5 130.5 O 18.5 19.5 21.5 N 16 15 19 M 13 15 19 K 46 58 68 J 40 46.5 55 H 73 88 106 F 76.5 91 110 Applicable cylinder ML2B25 ML2B32