ZQ-OM01401

ZQ1UA-5L-Q1 K2 Q2 K2 EA EB FA FB EC EE FC FE EA EB FA FB ZQ000UA-5L-PD ZZQ1A-BSB *ZQ3MA-K15L-*ZQ3MA-K25L-K*ZQ3MA-J15L-FVA VB ZQ1UAJ1 5LF ZQ1UAK1 5LZQ1UAK1 5LQ1 K2 Q2 K2 EC EE FC FE EA EB FA FB EA EB FA FB ZQ000UAK1 5LZQ000UAJ1 5LF EC EE FC FE EA EB FA FB *ZQ3MAK1 5L*ZQ3MAK2 5LK*ZQ3MAJ1 5LF 35 - No.ZQ-OM01401-B PD ZZQ1A-BSC *ZQ3MA-K15L---S *ZQ3MA-K25L-K--S PD ZZQ1AROB *ZQ000MA-K15L

Pneumatic Purification

675 2 5.32 25.81 2.56 11.02 E1702-EC 26.79 AFW954-N25-EC 954 2 1/2 7.88 27.46 2.56 25.35 E3127-EC 29.16 AFW1300-N30-EC 1300 3 7.88 27.46 2.56 34.17 E3783-EC 33.88 AFW675-AFW1530 AFW1530-N30-EC 1530 3 9.06 37.23 2.56 41.89 E3843-EC 38.81 Filter Performance (ISO8573.1) Particle Size CL.1 Oil Content CL.1 Flow @ 0.7MPa (100 PSI) & 20C Warning: Will not remove carbon monoxide nor carbon dioxide

Mechanically Jointed Rodless Cylinders

Heavy-loaded shock absorber + Adjustment bolt MY3B Bore size Stroke H (Shock absorber stroke) TS S EY SD ES EC W FC TU Stroke adjustment unit h TR (mm) ES EC W FC EY h S SD TS TR TU Shock absorber model Applicable cylinder MY3B16 MY3B20 MY3B25 MY3B32 MY3B40 MY3B50 MY3B63 14.1 23 62 34.5 29.5 RB1007 2.4 46.7 7 0.9 25 31.7 14.1 27.5 72 41 34 RB1007 2.4 46.7 7 4.4 21.5 28.2 20.1 31.8 90 52.2

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

29.1 EA 7 10.7 15.1 EB 21 26.6 37 EC 8 16.2 17.2 EY 27 36.2 57 FA 46.5 64.8 74.5 S 46.7 67.3 73.2 SD 6.7 17.7 T 7 12 15 TT 5.6 (Max. 11.2) 4.9 (Max. 16.4) 5.9 (Max. 21.9) W 28.6 37.2 51.6 High load shock absorber MY2HT Bore size Stroke H G (Shock absorber stroke) T S TT E SD EY EA EC Stroke adjusting unit Shock absorber FA EB W Applicable cylinder MY2HT16 MY2HT25 MY2HT40 SD 27.3 23.6 24

Made to Order

MY2H L unit S (Absorber stroke) T EY EC EA E Shock absorber SD Stroke adjustment unit FA FB W Adjustment bolt ED TT h E EA EC ED EY FA FB h S T SD TT W Shock absorber model Adjustment range Adjusting bolt Applicable cylinder MY2H16 MY2H25 MY2H40 RB0806 5.6 M5 x 0.8 x 25L 15.8 8.4 6.2 5 28 12.4 30 3.2 40.8 6 1.3 4.2 (Max. 9.8) 34.5 RB1007 11.5 M8 x 1.0 x 35L 19.6 10.6 10 5.5 37 19.3 44.8 4

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

Table of Contents

) Since it is normal, the number count is reset EC = 0.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

PC Wiring System

Each unit available with cover compatible with DIN rail mounting or as circuit board. 2-color LED indication With cover (DIN rail mount compatible) Circuit board type Power supply terminal block (Green): Normal (Red): Reverse connection (Off): Unconnected 586 Series PCW-EC PC Wiring /Series PCW-EC (e-con Type) P.589 P.590 P.591 Circuit board type With cover (DIN rail mount) Circuit board

Vacuum Module: Ejector System Series ZX

(VJ314) ZX1051-K15LZ-EC Related 0.5 Equipment ZX1051-K35MZ-EC General vacuum switch (ZSE2) Plug connector type With light/surge voltage supressor ZX1071-K15LZ-EC Connector type With silencer 24 VDC 0.7 ZX1071-K35MZ-EC ZX1101-K15LZ-EC 1.0 ZX1101-K35MZ-EC ZX1-K15LZ-E ZX1-K35MZ-E 867

ZQ-OM01301

ZQ-OM01301-A Vacuum ejector Manifold type (with the PD-port) ZZQ1A-BSC *ZQ3MA-K15L---S *ZQ3MA-K25L-K--S Vacuum pump system Manifold type (without the PD-port) ZZQ1A-ROB *ZQ000MA-K15L-*ZQ000MA-K25L-*ZQ000MA-J15L-FVacuum pump system Manifold type (with the PD-port) ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EC EE FC FE EA EB FA FB *ZQ3MAK1 5L-*ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1

15

EC ED Section XX2 XB (R2) XAH9 Section Y details XA [mm] LEYGlL (Ball bushing bearing) [mm] LEYGlM (Sliding bearing) * Refer to page 872 for the dimensions of motor flange.

ZSM1-115/121

Time Failure predict number (EC) Since it is normal, the number count is reset EC = 0. Abnormal EC = 1 Abnormal EC = 2 Abnormal EC = 3 884 Technical Information Auto shift function 12 The auto switch function is the function to regard the pressure value at the point of this signal being input as the benchmark and to display and conduct switching.

HRX-OM-O021

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series Documents 9-9 HRX-OM-O021 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

HRX-OM-R005

Table 9-5 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R005 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

JXCx-OMX0009

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 109 - Caution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Nil Nil Nil Nil Name plate and pressure gauge in imperial unit : MPa e Pressure unit Note2) Z Z Z Z Name plate

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

LEY40#EA: 9 kg, LEY40#EB:19 kg, LEY40#EC:38 kg LEYG40#EA:7 kg, LEYG40#EB:17 kg, LEYG40#EC:36 kg 75 - Cution (1) Supply power when the actuator is stationary. The controller acquires the absolute position data from the absolute encoder when power is applied.

Regulator

EC EC EC NPN open collector 1 output + Analog current output + ED ED ED ED c Flow direction Nil Nil Nil Nil Flow direction : Left to right R R R R Flow direction : Right to left + d Knob Nil Nil Nil Nil Upward V V V V Downward + 6 Name plate and pressure gauge in imperial unit : MPa Nil Nil Nil Nil e Pressure unit Note2) Z Z Z Z Name plate and pressure gauge in imperial unit : psi ZA ZA

Compact Cylinder/Guide Rod Type Series CQM

Standard without auto switch: 12 and 16; 5 stroke, 20; 5 to 15 stroke, 25; 5 and 10 stroke, Built-in magnet with auto switch: 20; 5 stroke 798 Compact Cylinder: Guide Rod Type Series CQM Dimensions 32 to 50 2 x HA through 2 x HB through Auto switch 2 x P V KA F Q 2 xN through 2 x 2 x OB counterbore with depth RB IB IA EC EB EA M Z (KB) KA M B + Stroke W L J EA EB EC A + Stroke CUJ CU 2 x