EXxx-OMW0014CN

diagnostics 01 5 Valve 26, 27 diagnostics 01 6 Valve 28, 29 diagnostics 01 7 Valve 30, 31 diagnostics 01 31 No.EX-OMW0014CN-A 5.1.2.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Note 2) Brass parts of AS2201FE-01 are electroless nickel plated. Note 3) Only for AS21FE-01. 660 ASFE Series Speed Controller with Residual Pressure Release Valve with One-touch Fitting Dimensions Elbow type Applicable tubing O.D. d Model Weight (g) T H1 H2 D1 D2 L1 L2 L3 L4 (1) A (2) M1 Max. Min. Max. Min.

Series H, DL, L, LL Self-align Fittings

Weight (g) M L2 L1 A 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 10 23.5 19.6 30 DL06-01 9 25 17 10 19.6 23.5 6 DL06-02 16 19 31 14 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 14 26.5 DL10-03 17 22 57 DL10-04 27 28.5 100

Vacuum Module Series ZX

Stabilize the source pressure by providing a tank and a vacuum regulator. Provide a vacuum switch valve to individual lines. Thus, in case of an error, each valve can be turned OFF to minimize the influences on other pads.

5

B A B A B A B A B A B A B Hs Hs Hs Hs 20 33 32 29 28 28.5 27.5 29.5 28.5 25 24 23.5 22.5 26.5 23.5 20 25.5 24.5 27 27.5 25 32.5 32.5 28.5 28.5 28 28 29 29 24.5 24.5 23 23 26 26 25 28 27 29.5 30 32 34 33 30 29 29.5 28.5 30.5 29.5 26 25 24.5 23.5 27.5 26.5 32 31.5 30.5 33 33.5 40 36 35 37.5 38 40 39 36 35 32 34.5 31.5 35.5 32.5 31 28 29.5 26.5 32.5 29.5 50 41.5 40.5 43 43.5 50 46 44 42 40 41.5

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Series IDG

to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

stop (e.g. a large load is mounted on a carrier). 7 11 7.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

ASP

Made to Order Lubricant: Vaseline X12 547 Series ASP How to Order ASP 3 30F 01 06 S Made to Order Lubricant: Vaseline X12 Ex.) ASP330F-01-06S-X12 With seal Pilot check valve Body size Applicable tubing O.D.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Looked by double solenoid valve) (Looked by double solenoid valve) SOL. location B (*) B (*) B B A B A B A B A B A A A A B A B A SOL. location VQC 3 position 3 position Double Double Double Double SI unit Single Single SI unit Single Single SQ Stations 1 2 3 4 5 Stations 1 2 3 4 5 VQ0 The places of asterisk are not used.

HRX-OM-X010

Potential malfunction may occur if a rectified AC with voltage rise (dv/dt) at zero crossing exceeds 40V /200 sec. Always establish a connection to a ground for safety.

Guide Cylinder/Compact Type Series MGC

D-H7NF D-H7BAL Auto switch model D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A9 D-M9 D-M9W D-M9 D-M9W D-C73C D-C80C D-B5 D-B64 D-B59W D-A9 Applicable bore size Applicable Hs Hs Hs Hs B A B A 23 (31) B A B A B A B A B A B A 19 (27) bore size 24.5 (32.5) 23.5 (31.5) 22.5 (30.5) 17.5 (25.5) 20.5 (28.5) 27 (35) 7 6 1 4 2.5 8 6.5

PF2A/PF2W

When a surge generating a load such as a relay or solenoid is directly driven, use a type of switch with a built-in surge absorbing element. 4. Since the type of fluid varies depending on the product, be sure to verify the specifications. The switches do not have an explosion proof rating. To prevent a possible fire hazard, do not use with flammable gases or fluids. 5.

VXZ

Series VXZ22/23 Construction N.C. N.O.

Pressure Switch/Reed Switch Type

Note) Prepare a spacer separately for modular connection. Pressure Switch with Piping Adapter JIS Symbol E 23 IS10E 30 03 (13) q w e r (23) (5000) (3000) (500) Pressure switch with piping adapter Semi-standard: Select one option each in a through d. Place them in alphanumerical order.

CYPSeries

When a load, such as a relay or solenoid valve, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.

CYPSeries

When a load, such as a relay or solenoid valve, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.