Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

Body Size: 40, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: D [N.O.

Body Size: 30, Model Type: D (Filter Regulator + Mist Separator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: D [N.O.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

(Digital Pressure Switch w/Unit Selection Function), D: D

(Digital Pressure Switch w/Unit Selection Function), D: D

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series HAW Water Cooled Aftercooler 1

Accessory (Option) Basic size (Applicable compressor kW) F With screw flange D With auto-drain Port size Symbol 2 Screw type Reciprocating type 2.2 7.5 15 22 37 55 75 04 06 14 20 30 Rc 1 2 Rc 3 4 Rc 1 1 2 Rc 2 3B flange HAW2 HAW7 HAW22/37 HAW55/75 HAW110 Caution on Design 7 22 22 Warning 1.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d