Compact Type

Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/ 3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Red LED lights when ON Indicator light Lead wire D-A90(V)/D-A93(V) Oilproof vinyl heavy insulation cable, 2.7, 0.18 mm2 x 2 cores (Brown, Blue), 0.5 m D-A96(V) Oilproof vinyl heavy insulation cabele, 2.7, 0.15 mm2 x 3 cores (Brown, Black

Compact Type Dual-Rod Cylinder Series CXSJ

Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/ 3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Red LED lights when ON Indicator light Lead wire D-A90(V)/D-A93(V) Oilproof vinyl heavy insulation cable, 2.7, 0.18 mm2 x 2 cores (Brown, Blue), 0.5 m D-A96(V) Oilproof vinyl heavy insulation cabele, 2.7, 0.15 mm2 x 3 cores (Brown, Black

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

NCA1

A R D S T R O K E O P T I O N O V E R S I Z E D R O D XB5 O P T I O N Inches Example: 04 = 4 Stroke When ordering an oversized rod, please order the following way to represent the rod size required.

Air Cylinder NCA1 Series

A R D S T R O K E O P T I O N O V E R S I Z E D R O D XB5 O P T I O N Inches Example: 04 = 4 Stroke When ordering an oversized rod, please order the following way to represent the rod size required.

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

Thermo-chiller/Rack Mount Type

not be detected v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Item Unit Standard value Influence Free carbon (CO2) [mg/L] 4.0 or less v Corrosion Scale generation *1 In the case of [Mcm], it will be 0.003 to 0.01.

MB1

(different sides, same side) D-Z73, Z76, Z80 Reed switch 15 25 1pc. D-Y59A(B), Y69A(B), 2pcs. (different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

7

Possible to mount magnetic field resistant auto switch in 3 directions [CKG1 series/Built-in standard magnet type] D-P3DWASC, D-P3DWASE, D-P3DWA/L/Z (AC magnetic field) D-P4DWSC, D-P4DWSE, D-P4DWL/Z (AC magnetic field) Magnetic field resistant auto switch [CKP1 series/Built-in strong magnet type] D-P79WSE, D-P74L/Z (DC/AC magnetic field) Switch mounting rod Auto switch mounting bracket CK1

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

wire Solid state auto switch Reed auto switch IC circuit 5 V, 12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Special function Indicator light Wiring (Output) Electrical entry Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) Applicable load DC AC Perpendicular In-line IC circuit 5 V 12 V 100 V or less A90 A90V No Relay, PLC 24 V 2-wire A93 A93V Grommet 100 V 12 V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire

CJ5-S

12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23

CJ5-S

D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis

Table of Contents

Reed Switch: Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) . Solid State Switch: Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) . 2-color Indication, Solid State Switch: Direct Mounting Style D-F9NW(V)/D-F9PW(V)/D-F9BW(V) . Safety Instructions . Warning . Actuator Precautions . Caution on Design . Selection . Mounting . Piping. Lubrication . Air Supply. Operating Environment.

MXW Series Long Stroke Slide Table

286.5 266.5 236.5 224.5 ( ) values for D-F9BV F9NV F9PV 154 154 154 Long Stroke Slide Table MXW Series 2 color indication solid state switch: D-F9BW (V), D-F9NW (V), D-F9PW (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 49.5 28.5 24.5 24.5 24.5 24.5 B 82.5 103.5 128.5 153.5 178.5 203.5 4 MXW 8 W 35.5 14.5 10.5 10.5 10.5 10.5 V 96.5 117.5 142.5

Low Profile Guide Type

Tightening Torque of Auto Switch Mounting Screws (N.m) Auto switch model Tightening torque D-A9(V) D-M9(V) D-M9W(V) D-M9A(V) 0.10 to 0.20 0.05 to 0.15 Mounting pattern q Mounting pattern e Mounting pattern w Auto switch Watchmakers screwdriver Auto switch mounting screw 5 to 6 (included with the auto switch) 1556 CY1F Series Specific Product Precautions 1 Be sure to read this before handling

ZR

Individual spacer ZR1-R1-2 V PV X X Vacuum port Rc 1/8 V port PD + + + + + + X X V X PV 70.5 SMC 16.5 X PD 12 V V (Pitch) 33 35.5 (Pitch) 33 35.5 EXH PD PV PS 13-3-31 31 Vacuum pad connection V port Series ZR Vacuum pad connection V port Ejector System Manifold Nozzle Dia./1.8, 2.0 mm Common exhaust EXH port Common ejector air supply PV port Common pilot valve air supply PS port Common vacuum

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector, I/O cable*4 Interface (Communication protocol/Input/Output) Mounting Symbol Type Applicable interface Nil