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L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max.

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size A, B P , EA, EB Connector mounting direction Symbol 03 04 3 8 1 2 1 2 Symbol Applicable base With connector M Mixed D Nil 01T, 10, 40 D side mounting None For bottom ported: Rc 3/8 only.

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

KJ

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

AS

A (1) (2) L4 (1) (2) Mass (g) Model M1 D1 D2 L1 L2 L3 d T H Min.

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

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AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

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AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(L): SY9 40(R)-LM plug connector (M): DIN terminal (D, Y): SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length) 60 75.4 Approx. 300 79.9 M8 x 1 (Lead wire length) Approx. 300 86.5 [93.5] 62.4 Pg7 113.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting D U Symbol A, B P , EA, EB D side mounting SY Passage Porting specifications (A, B) EA, EB P 03 04 M Mixed 3 8 Symbol 1 2 1 2 SV 1 2 Side Bottom D side For bottom ported: Rc 3/8 only.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

VFR

size A, B P , EA, EB Connector mounting direction Symbol 03 04 3 8 1 2 1 2 Symbol Applicable base With connector M Mixed D Nil 01T, 10, 40 D side mounting None For bottom ported: Rc 3/8 only.

VFS

D 01F VV5FS5 1 06 04 Thread type Stations Series VFS5000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 04 06 A, B P, R1, R2 T Plug-in type with D-sub connector 1 2 08 Rc Rc Rc M Mixed 8 stations U side F 3 4 3 4 Max. 8 stations Option Connector mounting direction Symbol For bottom ported, Rc is only available. 1 2 Porting specifications (A, B) D side D side mounting U side

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8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25

V

-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI Minimum

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5