OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 Built-in silencer P.1.10-48 P.1.10-52 C C6 (6) C8 (8) C8 (8) kit N7 (1/4) N9 (5/16) N9 (5/16) Built-in silencer P.1.10-48 P.1.10-52 C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) Built-in silencer P.1.10-80 P.1.10-82 1.10-5 Cylinder Speed Chart Series VQ0 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor

Rotary Table/

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

SMC

depth 5 HA GA 4H9 depth 3.5 +0.030 0 NN-M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15

240

5 C 20 5 52 S Straight type communication plug connector3 LEH Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 6) on page 380.

ITV

Regulating pressure range, by unit of standard measured pressure S1 S2 Preset pressure Unit OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 ITV01 ITV03 Regulating pressure range ITV05 MPa kgf/cm 2 0.005 to 0.9 0.05 to 9 0.05 to 9 0.7 to 130 5 to 900 0.005 to 0.5 0.05 to 5 0.05 to 5 0.7 to 70 5 to 500 0.005 to 0.1 0.05 to 1 0.05 to 1 0.7 to 15 5 to 100 For safety reasons, it is recommended that one

Stopper Cylinder

4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at retraction end Stroke adjuster at extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9

MK

5 !6 !7 !8 !

MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

REC

20 100V CE1 PLC D-C73C 5 to 40 24V DC AC DC CE2 D-C80C IC circuit, Relay, PLC 50 24Vor less D-B53,A33 5 to 50 24V DC PLC ML2B 5 to 50 24V DC D-B54 D-A34 D-A44 5 to 25 100V AC ML1C 5 to 12.5 200V AC AC DC 50 Relay, PLC 24Vor less REA D-B64 25 100V AC 12.5 200V AC REC 5 to 40 2 color** D-B59W 24V DC RHC * Use contact protection box when using "D-C7" or "D-C8" type in the following conditions

Escapements Series MIW/MIS

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

Sine Cylinder Series REC

5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

REC

5 V, 12 V IC circuit Diagnostic indication (2-color indication) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit Lead wire length symbols: 0.5 mNil 3 m L 5 m Z None N Since there are other applicable auto switches than listed, refer to page 10-2-102 for details.