2–4

5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

C95Series

~, 65 45 133 30 6 50 3: ; 65 175 9 15 11 ' 45 1202 12' , ~ I so 1 222 I~ ' : .~' , E5063 63 75 ~50_ L3L 35 16.5 52 40 L67 17.5 9 15 " ESoao 80 95 . 60 I 4j 140 16.5 56 50 I 86 10 11 la " 2.5 183 1250 16 , ., , E5100 ,.100_ 1114 70 ,~5 50 L7 .~ 76 O , 9" _ ,'' _11 18 1 le5 ", 1270 20' I'"' Rotating angle ~aore slze A" 8" N+'BO+90~ (mm) 3240 25' W 160' Q 5063 40' 50' 190' SO.I00 30' SS' 175

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Specification Temperature rise (C) Note) Temperature rise (C) Note) Model Power consumption (W) 45 45 60 Model Power consumption (W) 45 45 60 VX21 VX22 VX23 VX21 VX22 VX23 4.5 7 10.5 4.5 7 10.5 AC Specification AC Specification Apparent power (VA) Holding 19 16 43 35 62 52 Apparent power (VA) Holding 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush

Brake mechanism added

198 17 Without rod boot With rod boot Bore size (mm) MM N NN P S W l H ZZ e f h ZZ 40 50 63 80 100 M14 x 1.5 27 161.5 1/4 218.5 8 51 280.5 43 11.2 59 288.5 M18 x 1.5 30 175.5 3/8 235.5 0 58 304.5 52 11.2 66 312.5 1/4 M18 x 1.5 31 187 3/8 254 0 58 326 52 11.2 66 334 stroke M22 x 1.5 37 205 1/2 284 0 71 372 65 12.5 80 381 M26 x 1.5 40 214 1/2 300 0 72 389 65 14 81 398 Foot type 4 x LD LS +

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

MLGP

W B A A B W B: Retraction locking F: Extension locking 9-11-4 4 Series MLGP Specific Product Precautions 2 Be sure to read before handling. Mounting Piping Warning Warning Depending on the operating condition, change the position of plugs for the piping port. 1. For M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool. 2.

MLGP

W B A A B W B: Retraction locking F: Extension locking 9-11-4 4 Series MLGP Specific Product Precautions 2 Be sure to read before handling. Mounting Piping Warning Warning Depending on the operating condition, change the position of plugs for the piping port. 1. For M5 After tightening by hand, tighten additional 1/6 to 1/4 rotation with a tightening tool. 2.

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

AC Servo Motor Driver (SSCNET /H Type)

EDB: Stops with electronic dynamic brake for 400 W or less drivers Stops with dynamic brake for 750 W drivers SD: Forced stop deceleration 4. This is applicable when [Pr. PA04] is set to the initial value. The stop system of SD can be changed to DB using [Pr. PA04]. 5. This alarm will occur only in the J3 compatibility mode. -71- No.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(mm) D E Model LXPBAB50S--X LXPBAB75S--X LXPBAB-100S--X LXPBAB-125S--X LXPBAB-150S--X LXPBAB-175S--X LXPBAB-200S--X 44 52 120 90 Note) The overall length of an actuator is Stroke + 124 (141) + Motor dimension.

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When rod end female thread is used, use a thin wrench when tightening the piston rod. 708 Series CM2W-Z 10-/1121-/2220, 25, 32, 40 Double Rod Cylinder RoHS How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 F Z M9BW 21 C D M 2 W L 40 150 F Z M9BW Nil Built-in magnet Number of auto switches No Cylinder stroke (mm) D With auto switch (Built-in magnet) Nil

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

0.4

5 Port Solenoid Valve VQ1000/2000 Series Metal Seal Rubber Seal SV [Option] Power saving Power saving SYJ Standard: 0.4 W Standard: 0.4 W SZ (Reduced by 60% compared to current model) (Reduced by 60% compared to current model) VF VP4 High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 365 5 Port Solenoid

MXW Series Long Stroke Slide Table

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

3 Port Air Operated Valve Series SYJA300 1

55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26