Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

CM2

SCM220A, #12, #3, #19 CM2L25SCM225A, #12 SCM225A, #12, #3 SCM225A, #12, #3, #19 CM2L32SCM232A, #12 SCM232A, #12, #3 SCM232A, #12, #3, #19 CM2L40SCM240A, #12 SCM240A, #12, #3 SCM240A, #12, #3, #19 Basic Foot Built-in One-touch fitting Spring extend CM2L20SCM220A, #11 SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A,

C92

3 No. !4 !5 !6 !7 !8 !

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 2 (NPT1/4 - M20x1.5), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting S, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - M20x1.5, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: None (Standard), External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Table of Contents

Refer to page 3-8-52 for details.

LEC-OM02704CN

PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. RY(n2)0RY(N2)13.6.2(3) 5. *1 *2 *3 1 3 1 1 2 3 1 1 1 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

JXCx-OMT0023

Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

TABLE OF CONTENTS

50 50 40 150 125 75 45 50 30 25 1/32 3/64 1/16 1/16 3/32 1/16 3/32 1/32 3/64 1/16 3/32 3/32 1/8 1/8 .020 .048 .075 .075 .156 .075 .156 .022 .055 .075 .156 .156 .230 .230 ** MODEL E55 3 Way Directional Control E55GG8XCCM E55HH8XCCM E55JJ8XCCM E55KJ8XCCM E55KK8XCCM E55NJ8XCCM E55NK8XCCM 300 200 100 75 75 65 45 200 100 50 25 40 20 20 1/32* 3/64* 1/16* 3/32* 3/32* 1/8* 1/8* 1/32 3/64 1/16 1/16

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Basic type / Direct mount type Series CY3B/CY3R

3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

JXCx-OMU0026

Setting Data Entry . 52 9.1 Profile parameter . 52 9.2 Basic parameter . 54 9.3 Return to origin parameter . 56 9.4 Step data . 57 (1) ABS . 59 (2) INC . 59 -2No. JXC-OMU0026 (3) LIN-A / LIN-I . 59 (4) CIR-R / CIR-L / CIR-3 . 60 (5) SYN-I . 60 10.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

C1 = C D1 = (mm) L2 max Y D2 Size (mm) 10 D1 X L1 max Y 1 3 Size 2 to 8 C1 L1 = 10 15 3 Y 1.5 2 to 14 X 1 3 to 4 3 to 9 Y = C2 L2 = 15 20 3 to 4 Y 1.5 3 to 18 X 1.5 3 to 5 3 to 10 X = D2 = 20 30 3 to 5 Y 2 3 to 20 X 1.5 3 to 6 3 to 13 C2 = C 30 40 3 to 6 Y 4.5 3 to 22 X 2 3 to 8 6 to 15 Symbol: A7 The long shaft can be further shortened by machining it into a stepped round shaft with male

24

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B Solid state auto switch 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW