Air Pilot Operated Series NVSA

(4) N\6A 4 0 34 01 = Mounted on Individual Subplate 3/8'NPTF Sid Ports (5) 02 = Mounted on Indivldual Subplate 1/2" NPTF Side Ports (5) 52 = Mountad on Individual Subplate ' 1/2' NPTF Side Ports (5); 10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate 3/8" NPTF Side Ports (5); Bottom Ports (5) 3t = Mourted on Stacking Manifold Block.3/8" NPTF Side Ports (4) a3 = Mounted on Stacking

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

ZP

Symbol Thread dia. 1 A8 Buffer connection thread Symbol Pad dia. 2 A10 2 10 to 16 B5 3 20 to 32 3 A14 4 40, 50 B8 T 2 ZP B5 [q Adaptor] Not used for 02 to 08 diameter.

Compact Hydraulic Cylinder

5 V 3-wire (NPN equiv.)

Cylinder with Lock Series MNB

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series MNB Construction #3 $9 !3!4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

VFS

Refer to page 3-8-52 for details.

Table of Contents

-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C-3 AM850-20 AMD850-20 75 AMF1000-40 AMF900-30 AMF850-20 AMD850-20 AMD910-30 AMD910-40 AMD1010-40 IDF120D-3 110 150 220 IDF120D-3 IDF150D-3 IDF240D-3 AMF1000-40 For Rotary Screw Compressors (Without Aftercooler) Air compressor Refrigerated air dryer with built-in air cooled aftercooler (4)(6) Local line Flow capacity (m 3/min)

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-52 53 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) q t r w y e q t r w (B) 2 (A) 4 (A) 4 (B) 2 SV i SZ i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) SY SYJ u 3 position closed center/exhaust center/pressure center SX

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

3 !

7ND9071en

[6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C 17.5 1068 3/4 10 mm or 3/8" 12.0 20.0 Air supply piping 10 mm or 3/8" for all actuators.

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

5 Port Air Operated Valve

hole) 101.5 50.5 102 4.4 4.4 1P 3EB 3EB 1P 5EA 5EA 4.4 1/4, 3/8 [1(P), 5 (EA), 3 (EB) port] 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5) 66 47 (28.2) (Distance between ports) 4A 24 32 3 2B 1/8 (Pilot port: Upward) 28 2 x 4.3 (For mounting) 1/4, 3/8 [4 (A), 2 (B) port] 44 1/8 [Pilot port: Lateral

Solid State Auto Switches

pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown Diagnostic output OUT DC 3-wire type Brown Black DC (+) Blue DC () OUT DC 4-wire type Brown Black DC (+) Blue Orange DC () Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

15

3 mm or more.

Integrated Controller

Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25H (102) 64 3 H9 (+0.025 0 ) depth 3 45 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 8.5 22.5 38 3.5 50 3 H9 (+0.025 0 ) depth 3 54[(56)]4 52 L + Stroke (16) A + Stroke (Table traveling distance)2 (52) (158.4) 10 (56)[54]4 Stroke Parallel I/O connector (M12) 58