Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: F02 [G1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Pressure Range: -0.1 to 1 MPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

5

-X 175 CG1Y Series Mounting Bracket Axial foot: CG1YL B LH 15 LT ZZ + Stroke LS + Stroke Z X W 2 x LC (Knock pin position) Y X Y M W 4 x LD LZ LX (mm) Axial Foot Bore size (mm) B LC LD LH LS LT LX LZ M W X Y Z ZZ 20 34 4 6 20 53 3 32 44 3 10 15 7 47 118 25 38.5 4 6 22 53 3 36 49 3.5 10 15 7 52 123.5 32 45 4 7 25 53 3 44 58 3.5 10 16 8 53 125.5 40 54.5 4 7 30 60 3 54 71 4 10 16.5 8.5 63.5

KR

(mm) (1) Weight (g) D1 D2 L1 L2 A M Nylon Urethane KGL04-M5 KGL04-01 KGL04-02 KGL06-M5 KGL06-01 KGL06-02 KGL06-03 KGL08-01 KGL08-02 KGL08-03 KGL10-01 KGL10-02 KGL10-03 KGL10-04 KGL12-02 KGL12-03 M5 x 0.8 7 9.5 16 13.5 15 13 3.5 3.5 2.7 10 19 4 1 8 1 4 22 26 23 25 10 14 7 11.5 10.4 10 18 16 4.2 4.2 M5 x 0.8 3.1 12 10 33 13 21 35 25 26 14 10 14 17 12 14 17 3.5 3.5 16 14.5 17 23 25.5

CC

RB Round type hydraulic cylinder Series CHN Fluid Nominal pressure (MPa) Bore size (mm) Stroke (mm) Series J Stainless tube, 7 MPa hydraulic cylinder of small bore size Standard Long DHydraulic fluid 20 25 to 300 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid CHN -X 25 to 400 25 7 800 CHN 32 25 to 500 2040 Data 10-17-13 14 Series CH For details, refer to the catalog

Microspeed Cylinder

1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Rod end threads Female threads Rod end threads Male threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 Rod end thread tolerance

-fl Seies

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Soft Start-up Valve AV2000/3000/4000/5000 1

N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29

Gun Type Ionizer

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Round Type Hydraulic Cylinder

D Applicable bore size (mm) NT-02 NT-03 NT-04 AC-NI-50 Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 CHM CHM 8 8 9 11 5 6 8 10 12.5 16.5 21.0 23 20 25 32 40 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 26 32 38 41 30 36.9 43.9 47.3 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 13 17 22 24 26 32 38 41 CHS CH2 Accessory Brackets (Optional) CHA I-type

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously, supply pressure to port P on both sides and exhaust from port R on both sides, using "stations B (SUP/EXH block both sides)".

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

VDW Series

192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. x 2 2 stns. x 1 3 stns. x 3 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Vacuum Unit

M Replacement of filter element M Replacement of filter case M Replacement of sound absorbing material 2 steps 2 steps 3 steps e q q q w w w Filter case Filter element Silencer cover Sound absorbing material Transparent filter case allows visual check of the contamination. If there is dirt inside the case, it is possible to remove the case and clean it.

VCL

1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

AR20-B to AR60-B

34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR40(K)-06-B 3/4 1/8 75 93.2 35.8 33.8 M42 x 1.5 33.8 3 28 34.8 27.8 45.3 42.5 71.3 42.5 71.3 AR50(K)-B 3/4, 1 1/8 90 125.2 43 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 AR60(K)-B 1 1/8 95 129.6 46 43.3 M62 x 1.5 43.3 3.2 28 44.3 27.8 54.8 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount Panel mount M N Q R S T U V W Y Z