30

(mm) 3.2 4 6 8 10 12 16 H (Width across flat) 12 12 17 19 21 24 30 T (M) 2 x Applicable tube Mounting hole M Weight (g) L Model KQB2E23-00 KQB2E04-00 KQB2E06-00 KQB2E08-00 KQB2E10-00 KQB2E12-00 KQB2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14.8 14.7 29.2 34.9 47.1 58.7 107.2 11 11 15 16 19 21 28 M10 x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 32.2 32.4 35.4 38.8 40 42.4 46.8 12 12.6

AZ1000

to 160F (40 to 71C) (No freezing) 0.05 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 4 x 10-9 Pam3/sec 1) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.76 lbs (1.25 kg) 2) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Outboard

Clean Gas Filter

IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

VZ3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB 4 x 1 m AS1301F-04 AN120-M5 SZ3120-M5 3-3-19 Series VZ3000 Construction 2 position single 2 position double 3 position closed center 3 position closed center/exhaust center/pressure center

Electric Actuators

a = 3000 2000 m L1 10 20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 0 10 20 30 Transfer load m (kg) 4000 a=1000 L3 (mm) L3 a = 2000 2000 a = 3000 Mey m a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 150 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PC 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

5101 Applicable connector Internal wiring +COM, COM Weight W (g) Note 3) n1: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail W = 3.2n1 + 53n2 + m + 126.5 Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side supply/exhaust) , applying pressure to the P ports on both sides and exhausting from the R ports on both sides.

ITV

Right angle type cable connector 3 m 52 10 (33) Straight type cable connector 3 m 52 12.5 Setting part 10 M12 x 1 Cable connection thread (Plug type) 5.5 8 111 11 Digital pressure display M5 x 0.8 Solenoid valve EXH Breathing M4 x 0.7 depth 8 F.G.

reduces flow setting time

D3 W1 Applicable tubing O.D. d L3 A L4 D1 T L2 L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSl-M5E-02 2 5.8 15.8 20.3 11.9 AS12l1FSl-U10/32E-02 AS12l1FSl-M5E-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSl-U10/32E-23 AS12l1FSl-M5E-04 4 8.2 AS12l1FSl-U10

125

9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12

Modular Type Lubricators Series AL

5.4 6.5 8.5 R 26 35 47 N 8.4 8 10.5 Q 2.3 2.3 2.3 L 22 23 26 P 40 53 70 W 34.5 41 A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 36 38 40 G 57 73 H 28 30 35 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AL20 AL30 AL40 5 4 6 S F 3 7 8 2 9 1 W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A E H L IN OUT Bracket (Optional) D Sight glass assy not applicable to AL20 9 Accessories

VCL

2 x M Thread depth N 2 x M Thread depth N L L K K N.C.

CG1

1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10 Depth 16 M18 X 1.5 M10 Depth 22 M22 X 1.5 M12 Depth 22 M26 X 1.5 1-7-46 Low Friction: Double Acting Single Rod Series CG1Q With Mounting Bracket ZZ Axial foot Axial foot/CG1LQ (mm) Z Bore (mm) B LD LH LS LT LZ M LX Y LC X W Without rod boot 20 25 32 40 50 63 80 100 4 4 4 4 5 5 6 6 6 6 3 3 3 3 34 20 53 53 53 60 67 67

0.4

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Construction Conditions Base mounted Series CJ2 Series CM2 Series MB, CA2 Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer T0604 x 1 m AS3002F-06 AN110-01 SQ1000 AN20-02 AS4002F-10 T0604 x 1 m AS3002F-06 T1075 x 1 m T1209 x 1 m SQ2000 Front matter 2 EX510 Gateway-type Serial Transmission System Plug-in

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

D3 W1 Applicable tubing O.D. d L3 A L4 D1 T L2 L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSGl-M5-02 2 5.8 15.8 20.3 11.9 AS12l1FSGl-U10/32-02 AS12l1FSGl-M5-23 3.2 7.2 17.2 21.7 13.3 16.9 39 36.5 35 33.5 13.6 15.1 5.5 9.6 7 AS12l1FSGl-U10/32-23 AS12l1FSGl-M5-04 4 8.2 AS12l1FSGl-U10

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

2-Color Display Digital Flow Switch Series PFM

Power supply / Output connector (2 m) ZS-28-A D Bracket With M3 x 5 l (2 pcs.) ZS-28-B Mounting screw (M3 x 8 l) Sensor connector 1 pc. ZS-28-C-1 Panel mount adapter With M3 x 8 l (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8 l (2 pcs.)

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector (W0): SYJ74-W001 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20

Soft Start-up Valve

37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)-A AV3000-03-1 to 4G(Z)-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19