Bore Size: 63mm, Porting: NPT, Stroke: 40mm, Cushion Type: Rubber Bumper, Auto Switch: Y59B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure(

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: -, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: With bumper on both ends, Operating Pressure(MPa):

Bore Size: 10mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 40mm, Auto Switch: Y59B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -, Thread Port: -

Bore Size: 15mm, Thread: ø6-ø20 Bore: M Thread; ø25,32ø Bore: Rc 1/8, Stroke: 40mm, Auto Switch: Y59B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -, Thread Port: -

1

32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20, 25, 30 35, 40, 45, 50, 75, 100 CQ2AH 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 6-17-31 27 Made to Order Common Specifications: Long Stroke Made to Order Common

V100

Note 3) For the inch-size One-touch fittings, refer to page 4-14-40.

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

Environment

mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop LES 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

Refrigerated Thermo-chiller

[Outlet port: Max.] 0.9 50 40 0.8 0.4 0.7 40 30 0.6 0.3 30 0.5 20 0.4 0.2 20 0.3 [Return port] 10 0.2 0.1 10 [Return port] 0.1 0 0 0 0 0 10 20 30 40 0 10 20 30 40 Lifting height (m) Pressure (MPa) Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) The pump capacity of the HRZ010-W1S is same as that of the HRZ001-L1 group on page 85.

JXCx-OMU0004

300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400 1200

Programless controller Step motor (servo 24 VDC)

LEFS16A LEFS16B LEFS25H LEFS25A Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s] [mm/s2] [mm/s2] 0 10 200 5 200 20 200 12 200 1 20 300 10 300 30 300 20 300 2 30 400 15 400 40 400 30 400 3 40 500 20 500 50 500 40 500 4 50 600 25 600 60 600 50 600 5 60 700 30 700 80 700 60 700 6 80 800 40 800 100 800 80 800 7 100 900 50

1.1

Facility water required flow rate (l/min) Circulating fluid flow (l/min) 30 HRG010-A, HRG010-W HRG005-W 0.5 50 Outlet port [60 Hz] 0.4 40 Outlet port [50 Hz] 0.3 20 30 0.2 20 HRG002-W Return port HRG001-W 0.1 10 10 0 0.0 0 20 40 80 60 10 30 50 70 Pressure [MPa] Lifting height [m] Circulating fluid flow (l/min) HRG015-A, HRG015-W 0 0.5 50 0 10 20 30 40 Outlet port [60 Hz] 0.4 40 Facility water

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It