Compact Cylinder with Air Cushion Series RQ

32 L CU CW RR 18 36 7 28.5 M6 x 1.0 10 20 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 40 18 36 7 28.5 M6 x 1.0 10 22 50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

Mechanical Valves Series NVM, NVFM, NVZNI

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

VQ7-6/7-8

override A B PB 16 (23) (22)16 (11)10 12 (16) 62(72) 75(86) 62(72) 75(86) 50 PA R1 R2 P (P , A, B, R1, R2) 5-3/8, 1/2, 3/4 2-1/8 Indicator light B A Mounting hole 2-7.5 49(64) 49(64) 18 (20) (20)18 44(58) 44(58) G1/2 (Cable 8 to 10) Bottom ported drawing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 5 3 5 90 5 90 90 20 20 20 20 A 20 20 (3 x SA) MHSHJ3-63D MHSHJ3-80D Section SD SD 4 4 10 5 11 3 5 5 3 90 5 90 20 20 20 20 (mm) NB A Model L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5 10.5 11.5 13 14 CB 19 19 26.5 28 31 B 54 62 74

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ242 Rubber seal 10.8(0.6) 15 or less 20 or less VQZ312 Metal seal 14.4(0.8) 17 or less 22 or less N.C. VQZ332 Rubber seal 16.2(0.9) 25 or less 33 or less 92 VQZ300 VQZ322 Metal seal 13.5(0.75) 17 or less 22 or less N.O. VQZ342 Rubber seal 16.2(0.9) 25 or less 33 or less Note 1) Value for sub-plate with maximum port size.

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

New

suppressor) DIN terminal Model Q R U Q R U 27 27 29.5 R U T 64.5 64.5 67 Q VXF21A< VXF22A< VXF23A< 20 20 22 20 20 22 97 108 143.5 89 100 135.5 30 30 32.5 52.5 52.5 55 20 20 22 83.5 94.5 130 11 2 Port Solenoid Valve For Dust Collector Series VXF2 Dimensions: Direct piping type VXF21A<<B B D C S D C J Qp2 K I J R Tp2 K I S R Q z 280 (32) U L H L

Electric Rotary Table

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

40.5 63 PE 126.5 101 A A A A A SETTINGS 119.5 119.5 SV 1 0 R1 EA EB MOD/NET PWR MODEL SQ (SI No.EX124-SDN1) 150.5 158 SMC P R2.7 SYJ R2 B B B B B TM SZ 5.4 16.5 VP4 L1 30.5 L2 S0700 38 VQ 1 2 3 4 5 6 7 8 n Stations D side U side VQ4 VQ5 VQC 123.5 SMC SMC SMC SMC SMC VQZ 88.5 B B B B B B B B SQ 47 37.5 A A A A A A A A VFS 2 11.5 9 37.5 28 42 4(A), 2(B) port 2n x Rc 1/8, 1/4 VFR EX123: 2 x

Air Cylinder

400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25

VQ7-6/7-8

override A B PB 16 (23) (22)16 (11)10 12 (16) 62(72) 75(86) 62(72) 75(86) 50 PA R1 R2 P (P , A, B, R1, R2) 5-3/8, 1/2, 3/4 2-1/8 Indicator light B A Mounting hole 2-7.5 49(64) 49(64) 18 (20) (20)18 44(58) 44(58) G1/2 (Cable 8 to 10) Bottom ported drawing Y(PE) port 1/8 153(166) 141(154) SMC 108.5(121.5) 23(30) (A, B port) Y 12 50(63) 38(53) 5 3 32(42) 38(53) 23(30) 1 2-3/8, 1/2, 3/4 3/8,

Cylinder with Lock Series CLS

Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5

AC Servo Motor Driver (CC-Link Type ）

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 13 22 13.

45

SX3000-75-2A SX5000-76-2A SX3000 SX5000 Note) When mounting blanking plate, be sure to mount a short cap. Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no.

45

SX3000-75-2A SX5000-76-6A SX3000 SX5000 Note) When mounting blanking plate, be sure to mount a short cap. Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 Effective area 14 mm2 A 16 22 25 B 26 53.8 70 C Series Part no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS