0.5

distance [mm] wStatic Neutralization Range IZF10 IZF10-L 300 mm 300 mm 8 s 8 s 4 s 4 s 0 0 2 s 6 s 2 s 6 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation distance [mm] IZF10R (Air flow level: 4) IZF10R (Air flow level: 1) 300 mm 300 mm 6 s 2 s 8 s 6 s 4 s 2 s 8 s 0 0 4 s 300 mm 300 mm 600 300 900 1200 600 300 900 1200 Installation distance [mm] Installation

C76

50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89

C76

200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

8 to 400 30 to 1200 20 to 850 10 to 300 401to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 620 8 to 310 30 to 1200 20 to 850 10 to 300 In-line Stroke 701 to 800 20

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

Air Slide Table

6 MXQR-BS6 1.4 MXQR-BS8 MXQR 8 M3 x 12 14.6 12 12 M3 x 12 16.6 8 M8 x 1 40.8 5 12.5 14 24.5 20 7 7 MXQR-JS8 1.4 6 MXQR-BS12 MXQR12 M4 x 12 18.5 13 12 M4 x 12 20.5 11 M8 x 1 40.8 11 14 29 18 9.5 7 5 MXQR-JS12 1.4 7 46.7 MXQR-BS16 MXQR16 M5 x 16 21 16 13.5 14 M10 x 1 M5 x 16 23 13.5 17 36 11 22 9 6 45.3 MXQR-JS16 11 67.3 MXQR-BS20 MXQR20 M6 x 20 25 22 17 19 M14 x 1.5 M6 x 18 27 12 17.5 22

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

275 300 312.5 337.5 350 375 400 3/5 R 3/5 R L3 261 280 299 318 337 356 375 L4 12 15 12 15 11.5 14.5 17.5 Manual override (non-locking) Stations 16 18 17 19 20 4-One-touch fitting (ports P, R) Applicable tube O.D.: 12 L1 423 460.5 448 485.5 498 DIN rail holding screw L2 412.5 450 437.5 475 487.5 Manual override In case of locking type, turn after pushing in.

MY1

12 12 11.5 11.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

/

VDC Dimensions P. 17 (Single unit) 12 Series VXE21/22/23 When the fluid is oil.

Cylinder with Lock Series CNS

300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 700 800 3000 160 600 2000 160 140 500 140 125 125 400 1000 Load mass: m (kg) Load mass: m (kg) 700 800 900 300 600 500 400 200 300 D200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum

5

01 03 50 12 Part no.

Manifold Specifications

Stations L1 L2 L3 L4 Stations L1 L2 L3 L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

7

Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

ZP

width across flats (M6: 8, M8: 12) ZX Hexagon widthacross flats 12 Hexagon widthacross flats 12 ZR Applicable tubing O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

273 262.5 244 14.5 17 285.5 275 254.5 15.5 18 298 287.5 265 16.5 19 310.5 300 275.5 17.5 20 310.5 300 286 12.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12

VM

12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Floating Joint

JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45

Thermo-chiller/Rack Mount Type

300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature