Air Cylinder

5.5 5 6 D-F55 6 6.5 6.5 7 9 10 11 11 11 D-A511 D-B59W 14 14 17 16 18 D-P3DW 4.5 5 6 5.5 6 D-P4DW 4 4 4.5 4 4.5 Values which include hysteresis are for guideline

Modular F.R.L. Unit

18 9 9 26 4 50 AC40 Y500T 5 96 48 86 40 18 9 9 27 4.6 50 AC40-06 Y600T 6 120 60 112 50 20 11 11 31 6.4 70 AC50, AC55, AC60, AC50B, AC55B, AC60B Replacement parts Description Material Part no.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67 66 82 218 218 86 106 82.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic type.

Air Slide Table

Retraction stroke end Applicable size Model Stroke adjustment range (mm) A B C F G H J K 1) E 5 16.5 MXQR-AT 6 MXQR 6 17.5 19 8.5 7 2.5 6 M5 x 0.8 M2.5 x 9 15 26.5 MXQR-AT 6-X11 5 19.5 MXQR-AT 8 MXQR 8 M6 x 1 M3 x 11 21 22 11 15 29.5 8 3 7 MXQR-AT 8-X11 H E 25 39.5 MXQR-AT 8-X12 5 23.5 MXQR-AT12 G MXQR12 28 29 14 15 33.5 12 M8 x 1 M4 x 14 4 10 MXQR-AT12-X11 B 25 43.5 MXQR-AT12-X12 J 5 24.5

NCA1

1.06 2 1/4 1 3/8 2.13 2.48 3 3/4 6 1/8 6 1/8 6 11/16 325 (3.25) 1 3/8 1-14 1 5/8 3.9 1/2 3 13/16 1 15/16 1 1/4 3/4 11/64 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 2 3/4 1 5/8 2.59 2.72 4 1/4 7 3/8 7 3/8 7 7/8 400 (4) 1 3/8 1-14 1 5/8 4.7 1/2 4 1/2 2 1/4 1 1/4 3/4 11/64 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1/2 5/8 1.57 1.18 3 1/2 1 5/8 2.59 2.72 4 1/4 7 3/8 7 3/8 7 7/8 Oversized Rod

Compact Cylinder Series CQS

A B 32 32 41 44 F 7.5 7.5 9 11 L A B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 12 16 20 25 45.5 13.5 25.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 6 8 7 12 6 8 10 12 25 29 36 40 M4 x 0.7 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 20.5 M3 x 0.5 32 38 47 52 5 6 8 10 15.5 20 3.5 3.5 5.4 5.4 45.5 13.5 25.5 34 M4 x 0.7

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

7.5

11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.

MG

5 @3 !0 !

CRB2/CRBU2/CRB1

R E (g6) Q3 Q2 F (h9) B Q1 P C D G1 G2 J K L M N Model A 90 180 270 M5 M3 3.4 (5.5) CRB2BW10-S CRB2BW10-SE CRB2BW15-S CRB2BW15-SE CRB2BW20-S CRB2BW20-SE CRB2BW30-S CRB2BW30-SE M3 (6) 5 8.5 5 11 9 14 10 15.5 25 9.5 25 10 25 13 25 14 0 0.036 15 24 8 14 9 3 1 5 9 0.5 0.004 0.012 29 4 M3 M3 (5) 3.4 (6) M5 M3 M3 (10) 0.004 0.012 0 0.043 20 29 9 18 12 4 1.5 6 10 0.5 5 34 M3 M4 (7.5) 4.5 (11) M4

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

IDX-OM-W019

Specification for Option T 11 1 Safety instructions. 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 2 11 4 How to connect the power supply and signal cable . 11 2 11 5 Electric wining diagram . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions. 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 Chapter 13 Service Record 13 1 Service Record

17

100 80 22 (10) 22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19) L = 50 mm, V = 400 mm/s (20) L =100 mm, V = 400 mm/s MGPL12 to 25, MGPA12 to 25 MGPL12 to 25, MGPA12 to 25 11 (5) 11 (5) 25 25 25 25 25 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 20

IDX-OM-W034

for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option V 12 1 Safety instructions . 12 -1 12 2 Specifications . 12 -1 12 3 How to perform maintenance. 12 -2 12 4 Electric

Title not found

Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15