Clean Series: Vacuum Suction Type, Bore Size: 25mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 25mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 25mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire: 3m, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 25mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 1m, Number: -

MA

An auto switch for detecting the location can be mounted. 10D MHZ2-16D 20D 10DN MHZ2-16DN 20DN Tool stand Added to the standard tool adapter The height for setting a tool can be adjusted. An auto switch for detecting a tool can be mounted. (Series MA3 only) (Series MA3 only) Rotary actuated type MHR2-10 15 Refer to AHC system Series MA. 12-12-17

MA

An auto switch for detecting the location can be mounted. 10D MHZ2-16D 20D 10DN MHZ2-16DN 20DN Tool stand Added to the standard tool adapter The height for setting a tool can be adjusted. An auto switch for detecting a tool can be mounted. (Series MA3 only) (Series MA3 only) Rotary actuated type MHR2-10 15 Refer to AHC system Series MA. 12-12-17

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

Clean Series: 11 (Vacuum Suction Type), Bore Size: 16mm, Finger Option: Basic Style (Standard Type), Auto Switch: M9B (Solid State, Gen. Purpose, 2 Wire, Horizontal)

Clean Series: 11 (Vacuum Suction Type), Bore Size: 20mm, Finger Option: 2 (Through-holes in Opening/Closing Direction, Standard Type), Auto Switch: M9B (Solid State, Gen. Purpose, 2 Wire, Horizontal)

Clean Series: 11 (Vacuum Suction Type), Bore Size: 10mm, Finger Option: Basic Style (Standard Type), Auto Switch: M9B (Solid State, Gen. Purpose, 2 Wire, Horizontal)

Clean Series: Vacuum Suction Type, Bore Size: 16mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: -, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 20mm, Finger Option: Through-holes in Opening/Closing Direction, Standard Type, Auto Switch: Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: -, Number: -

Clean Series: Vacuum Suction Type, Bore Size: 10mm, Finger Option: Basic Style (Standard Type), Auto Switch: Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: -, Number: -

The 11/22-MHZ2 series is a clean room series standard type parallel air gripper, taking the place of the MHQ(G)2 series. A linear guide provides high rigidity and high accuracy. MHZ2 can operate under higher pressure even at a larger holding point and overhang. High degree of mounting precision is achieved and mounting repeatability is improved.

The 11/22-MHZ2 series is a clean room series standard type parallel air gripper, taking the place of the MHQ(G)2 series. A linear guide provides high rigidity and high accuracy. MHZ2 can operate under higher pressure even at a larger holding point and overhang. High degree of mounting precision is achieved and mounting repeatability is improved.

Trimmer Auto Switch Series D-
7K/D-R
K

Applicable actuator and operation range (angle) Sensor unit D-Y7K Air gripper (mm or ) Model Bore size (mm) 10 4 12 16 20 25 32 40 50 63 80 100 MHZ2 MHL2 MHS2 (2 finger) MHS3 (3 finger) MHS4 (4 finger) MHC2 MHW2 Parallel gripper 7 8 8.5 7 5 Wide opening 6.8 10.5 11 12.5 8.5 8 Parallel gripper 6.5 7 7.5 8.5 Parallel gripper 6.5 7 7.5 8 Parallel gripper 6.5 7 7.5 8.5 30 to 10 30 to

Consider using a 10-CRB series rotary actuator or an 11-MSQ series rotary table in combination with an 11-MHZ2 series air gripper.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

Refer to page 8-11-96.

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.