AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

DOC1001322

Displays the run and stop status of the product. (4) Operating condition display P.5-11 (5) Compressor operating condition display Displays the run and stop status of the compressor. P.5-11 (6) Pump Operating condition display Displays the run and stop status of the pump.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) 08, 09 06, 07 Number of needle rotations Number of needle rotations 15-9-44 3 Speed

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

Booster Regulator/Air Tank

Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312

EXxx-OMK0006

Bit number Value meaning 31 (MSB) X do not care 0 Device does not generate SYNC message 30 1 Device generate SYNC message 0 11 bit ID (CAN 2.0A) 29 1 29 bit ID (CAN 2.0B) 0 if bit 29 = 0 28 to 11 X If bit 29 = 1: bits 28 to 11 of 29-bit-SYNC-COB-ID 10 to 0 (LSB) X bits 10 to 0 of SYNC-COB-ID : The default values when the SI unit is supplied. Bits 29 to 11 are fixed (not changeable).

VEX1

Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 1(P) 2(A) 3(R) 02 02 01 02 03 04 04 06 10 10 12 14 20 Port size 11 2 1 11 4 11 4 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 2 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 3.9 4.0 Mass (kg) Note) Non-lubricated specifications are not available for this product.

Programless controller (with stroke study) Step motor (servo 24 VDC)

17500 15 1000 20 2000 20 48 No.JXC-OMU0030-A 11.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

Compact Cylinder with Air Cushion and Lock Series RLQ

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) Mass (g) Bore size (mm) T1 RS T2 V W Part No. H (With locking) YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA Material: Chromium molybdenum steel (mm) Part No.

RLQ

Applicable Auto Switch/Refer to page 9-15-11 for further information on auto switches.

1.1

Thermo-cooler side Customers equipment side 9 RD Circuit configuration diagram 10 SD Internal circuit L N 1 2 3 4 5 6 7 8 9 10 11 11 SG Power supply cable Signal cable Communication cable outlet (also used as signal cable outlet) Front side Power cable entry 11 Series HRGC Option symbol T High-lift Pump Option combination ( : Available, : Not available, : Possible, but specification needs

MONOSASHI-KUN WITH BRAKE CONTROLLER

Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1. Data Sheet Specifications are subject to change without prior notice CE2/CEU2 MONOSASHI-KUN WITH BRAKE/CONTROLLER Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-OM038xx

LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Compact Cylinder

Standard CE marking Lead wires Oilproof heavy-duty vinyl cable: 2.7 x 3.2 ellipse D-M9B(V) 0.15 mm2 x 2 cores D-M9N(V), D-M9P(V) 0.15 mm2 x 3 cores Note 1) Refer to page 11 for solid state switch common specifications. Note 2) Refer to page 11 for lead wire lengths. Weights Unit: g D-M9N(V) D-M9P(V) D-M9B(V) Auto switch part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No. K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

CKZ2N

ACA201M ACA202M ACA203M CKZ-50A001 CKZ-50A002 CKZ-50A003 CKZ-50A007 CKZ-50A008 CKZ-50A009 0.6 (1.32) 0.7 (1.54) 0.9 (1.98) 0.7 (1.54) 0.8 (1.76) 1.0 (2.20) Straight-Machined 25 mm Offset-Machined A A B B 8F7+0.013 +0.028 through C C D D E E F G 8F7+0.013 +0.028 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 11 through 30 0.025 30 0.025 I 11 through M6 x 1.0 M6 x 1.0 H I 15 0.03 15