PFxx-OMA1007

Internal communication error 1: Error 0: No error 12 Built-in solenoid valve error 1: Error 0: No error 13 Internal system error 1: Error 0: No error 14 EEPROM error 1: EEPROM error 0: No error 15 Error 1: Any one of bits 11 to 14 is "1". 0: Bit 11 to 14 of the Bit offset are "0". -82No.PF-OMA1007-B Byte 26 Details Bit Description Details Value 0 Air Management Hub internal error 1 L+ short

Compact Slide Series MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Up to 100 Up to 300 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) 50 (4) 200 (6) 50 (7) 200 (9) 50 (10) 200 (12) (2) 100 (5) 100 (8) 100 (11) Load eccentricity (l mm) (1) (3) Selection graph L: Overhang (the distance from the cylinder shaft center to the load center of gravity) The direction of L can also

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

(mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500 10 13 171 11 28 184 23 14 182 195 up to 600 14 17 194 15 40 206 30 20 209 221 up to 600 14 17 194 15 40 206 30 20 209 221 U up to 750 22 26 246 23 60 264 42 30 269 287 CX L RR up to 750 22 26 246 23 60 264 42 30 269 287 Z + Stroke CZ ZZ + Stroke Center trunnion

Compact Electric Actuator Series LG1

CN1 CN2 Shuts off 3 12 13 9 10 7 8 20 17 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG P5 19 OP 4 11 LG V+ 1 P5 LG MR MRR MD MDR SD 20 12 7 6 SG P5 LG MR MRR MD MDR SHD P5 LG MR MRR MD MDR SHD 7 8 1 2 4 5 9 7 8 1 2 4 9 Detector 17 16 Plate 5 (Note 2) 11 15 14 2 12 (Note 6) Connect the shielding wire securely to the ground plate inside the connector.

Card Motor

As W = 50 < Wmax = 500, the selected model W Wmax can be used.

Vacuum Unit Ejector / Vacuum Pump System

Note 10) Select C, C1 for (6) Wiring Combinations for the single unit model. (5) Options Note 11) Symbol Type Nil Without option B With DIN rail mounting bracket Note 12) D With common release pressure supply (PD) port Note 13) L Manifold individual supply specification Note 14) Note 11) When more than one option is selected, list the option symbols in an alphabetical order.

90

Release valve 9 stations Release valve 23 Supply valve 6 5 Supply valve 11 10 stations Release valve 10 stations 24 Release valve 4 3 12 Supply valve Supply valve 25 11 stations Release valve 11 stations Release valve 2 1 13 Supply valve Supply valve 12 stations Release valve 12 stations Release valve COM. 25 Triangle mark indicator position COM. 26 Positive common specification Positive

HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

coefficient Allowable moment coefficient 0.7 0.7 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 50 100 200 300 500 700 Average speed Va mm/s 50 100 200 300 500 700 Average speed Va mm/s Collision speed V mm/s Note) Use average speed to calculate static moment.

New

Discharge Volume 1500 200 1500 VXF(A)28B VXF(A)23A VXF(A)27B 150 Discharge volume (L) Discharge volume (L) Discharge volume (L) 1000 1000 VXF(A)25A, B 100 VXF(A)26< 500 500 VXF(A)22A 50 VXF(A)24A VXF(A)21A 0 0 0 0 500 1000 1500 Piping length to the pilot valve (mm) 0 500 1000 1500 Piping length to the pilot valve (mm) 0 500 1500 1000 Piping length to the pilot valve (mm) 8 Series VXF2/VXFA2

Series KV2 Fittings

Color Caps KQ2C-_ _[ _ _ ] L ID OD Code Color R YR BR Y G CB W B GR BU Red Orange Brown Yellow Green Sky Blue White Black Grey Blue Applicable Tube OD (Inch) Part Number ID L Bag/Box Quantity OD 5/32 1/4 3/8 1/2 5/8 KQ2C-04[ ] KQ2C-07[ ] KQ2C-11[ ] KQ2C-13[ ] KQ2C-16[ ] 10.5 12.6 16.6 20.6 26.3 7.0 7.5 10.7 13.9 17.2 2.7 2.9 3.1 3.1 3.9 50/500 50/500 50/500 50/500 50/500 Fitting Boots KR-

HRX-OM-Y098

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Digital Flow Switches Series PF2A

10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 Series PF2A Dimensions: Remote Type Display Unit for Air (4-channel Flow Monitor) PF2A200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

OMR0031

[mm] [s] 0 1 Pushing Absolute 9.00 0.50 2 500 2 Positioning Absolute 5.00 0.10 500 Controller Parallel input / output signals Flow chart (Reference) (1) Turn the SVON signal ON. (The motor is energized.) (2) Select/input Step No.1: Turn the IN0 input ON, and the "IN1"input OFF.

MXH

Vertical Horizontal l : Load eccentricity m Mounting orientation m L L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1)

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Product weight Model LEJS100 Stroke [mm] 200 300 400 500 600 800 1000 1200 1500 Product weight [kg] 20.4 22.5 24.6 26.7 28.8 33.0 37.1 41.3 47.6 1.0 Additional weight with lock [kg] -5- 1.2 Motorless 1.2.1 How to order L E J S 100 N B 500 T X400 Motor type Stroke [mm] Lead [mm] N Motorless 200 200 H 50 to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

Sine Rodless Cylinder Series REA

range Usable range Usable range 10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500

JXCx-OMX0009

100 500 1 1 200 1000 200 1000 2 2 To MOT 50 200 50 200 3 3 or PC To PWR USB cable (A-miniB type) Part No.