25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Air Slide Table Series MXP Dimensions MXP16/With Shock Absorber 2-M5 x 0.8 depth 8 Z 3 V K 6.5 Max. 15 11 M Stroke: S MXP16-20B Width across flats 12 A M8 x 1 H 24.3 17.1 14.4 40.8 MA 10.5 11 11 8.5 27.3 34 Operating port 2-M5 x 0.8 (Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

Mechanically Jointed Rodless Cylinder Series MY2

Wn Mass mn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 0.88 kg 65 mm 0 mm 5 mm 111 Wb 4.35 kg 150 mm 0 mm 42.5 mm Y 210 Y Wc 0.795 kg 150 mm 111 mm 42.5 mm Wd 1.5 kg 150 mm 210 mm 42.5 mm n = a, b, c, d 3 Composite Center of Gravity Calculation m3 = mn = 0.88 + 4.35 + 0.795 + 1.5 = 7.525 kg m3 1 X = x (mn x xn) 7.525 1 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.5 x 150) = 140.1 mm m3 1 Y = x

MXW Series Long Stroke Slide Table

Table Dimensions MXW 25 Stroke: 100, 125, 150 Operating port 2-Rc (PT) 1/8 (mm) J 20 Width across hexagon socket hole 5 Scale:15% 11 Width across flats 17 8H9 +0.036depth 9 0 Operating port Rc (PT) 1/8 9 8-M6 x 1 thread depth 18.5 (Helisert) 8H9 +0.036depth 9 0 Operation direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50 37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MGC MGF MGZ CY MY 3.8-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Centre trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

Free Mount Cylinder Series CU

10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40

ZP

-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

LEYx-OMZ0015

Maximum Speed Range 405 to 500 800 400 200 640 320 160 of 70 Note3) [mm/s] 505 to 600 800 400 200 stroke 605 to 700 600 300 150 705 to 800 500 250 125 Pushing speed [mm/s] Note4) 35 or less 30 or less 30 or less acceleration/deceleration [mm/s2] 5,000 5,000 5,000 3,000 Positioning repeatability [mm] 0.02[Basic type] / 0.01[High precision type] Lost motion[mm] 0.1 or less[Basic type] / 0.05

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

PFxx-OMX0002

(OUT2 switch output does not exist in the output specification of this model) Press the S button for 1 to 3 seconds. Press the S button for 3 to 5 seconds. Press S button once.

1.63

speed of 200 mm/s.

CG1

to 300 Up to 300 Up to 300 11 11 10 (11) 10 (12) 12 (13) 12 (13) 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 10 (12) 20 25 32 40 50 63 80 100 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 26 31 38 47 58 72 89 M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 12 14 18 25 30 32 40 50 14 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26

Air Cylinder Series CS1

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Air-hydro Kit no.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

K35-OMW0030

/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (5) IN-777-200TF-300F*-HL (6) IN-777-250TF-350F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.