HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

1.63

= 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.1 0.1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) 508 Model Selection MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (21) L = 50 mm, V = 200 mm/s or less (22) L = 100 mm, V

39

(mm) Bore size (mm) B C D E GA GC I J K L LA LB MM GB N NA NB NC NN P 50 63 92 48 12 13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4

MHZ2/MHZJ2

50 Pressure 0.2MPa Pressure 0.2MPa 40 H Overhang H mm Overhang H mm 40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa

CE2

25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

Secondary Batteries

L RSH 90 Heavy Duty Stopper Cylinder 50, 63 30 M9BWL 50 D L RS1H 90 Number of auto switches Bore size 50 63 Series compatible with secondary batteries 50 mm 63 mm (auto switch number mounted) 90 Material restriction Nil S 2 pcs. 1 pc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MY1 3.4-11 End Lock Cylinder Series CBA1 40, 50, 63, 80, 100 How to Order L 50 150 H N CBA1 Standard L 50 150 A53 H N CDBA1 With auto switch Number of auto switches Air cylinder with auto switch 2 1 n S n Mounting Basic Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Style Auto switch Lube Non-lube Steel tube N F Without auto switch Refer

7

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

OMR0031

50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel distance [mm] Total travel distance [mm] 36 - (2) Speed entry method Settings: Target position [mm], Speed [mm/s], Acceleration [mm/s2], Deceleration [mm/s2], Load mass [g] To obtain the total travel distance S [mm] in absolute Acceleration Aa Speed Vc Speed [mm/s] positioning

1

ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11

PF-OMM0004_C

1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10

Series AP500

0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

F

G A S K E T C O N S T R U C T I O N A g a s k e t m a d e o f s t a i n l e s s s h e e t c o v e r e d w i t h l a m i n a t e d N B R o n b o t h s i d e s i s s e a t e d o n t h e chamfer of a female thread to materialize a perfect sealing construction irrespective of the difference in thread diameters due to the difference in the types of female threads, variation in tolerance, difference

Compressed Air Preparation Filter

42.5 3 167.4 57.2 Size 40 2 1/4, 3/8, 1/2 145.2 25.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 3 220.4 75.2 Size 50 2 3/4, 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 Size 60 2 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 25 Modular Connection Example (Dimensions) AFF/AM/AMD/AMK Series Combination example e A Y300T-D S F Line Filter AFF30-03-D 1 pc.

VQC

B 9 10 11 (-S) (-T) (-S) (-T) 18 SOL. A 6 Station 8 SOL. B 24 25 19 12 13 C6 (EXH port) 6 One-touch fitting COM 13 Connector terminal no. Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For AC voltage valves there is no S option. It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC.

Direct Solenoid

P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 E