REA/REB

43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 QW T W X Y LD MM N P PW Q WS Z K L M Model REAR10 14 19.5 20 15 39.5 3.5 M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 9 9 4.7 10 31 10.3 0.7 27.4 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G

Cylinder with Lock Series MNB

1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22

C95

K1 G2 ER G3 EN G1 K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12

Rotary Actuator

Applicable shaft types: J, T X = Y = X = Y = Y = X = Y = Y = [mm] [mm] [mm] Size X Y 30 3 to 13 3 to 10 50 3.5 to 27 1 to 20 63 3.5 to 29 1 to 22 80 4 to 38 1 to 25 100 5 to 44 1 to 30 Size X Y 30 3 to 25 3 to 10 50 3.5 to 36 1 to 20 63 3.5 to 41 1 to 22 80 4 to 50 1 to 25 100 5 to 60 1 to 30 Size Y 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A59 Note) Except flange type The rotation

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CX CZ L RR 25 15 to 100 14 20 18 36 14.5 10 105 to 200 32 20 to 100 14 22 18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.

MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

15

LEC Y Size Motor type MM TT PD PP NZ M2.5 x 10 1.0 8 12.5 NY M2.5 x 10 1.0 8 12.5 NX M2.5 x 10 1.0 8 7 NM1 M3 x 5 0.63 5 10.5 NM2 M2.5 x 10 1.0 6 12.4 Motorless Motorless 25 LAT LEY32D, LEYG32lD: NM1 NZ M3 x 12 1.5 14 18 NY M4 x 12 3.6 11 18 NX M4 x 12 3.6 9 5 NW M4 x 12 3.6 9 12 NV M4 x 12 3.6 9 5 NU M4 x 12 3.6 11 12 NT M3 x 12 1.5 12 18 NM1 M4 x 5 1.5 6.35 2.1 NM2 M4 x 12 3.6 10 3 LZ [

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

ZP

Form w 1 Material Y E N S U F GN GS 10 10 12 4 13 15 6 16 16 18 16 7 C ZP D 25 25 28 15 20 10 A 40 40 43 7 18 29 17 B 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber Construction p. 117 Mounting Bracket Assembly From p. 121 With adapter 10 to 40 ZPT 10 A5 w q D N e Connection thread (Male thread) D E F A5 M5 x 0.8 (M3 x 0.5 With

Rotary Clamp Cylinders

45 36 20 53.5 9 67 14 18 6 15 to 25 M8 x 1.25 6.2 43 18 45 36 20 61 9 67 14 18 6 M10 x 1.5 8.2 53 23 65 46 22 77 11.5 88 18 22 8 30 to 40 M10 x 1.5 8.2 52.5 23 65 46 22 76.5 11.5 88 18 22 8 8 Rotary Clamp Cylinder: Heavy Duty Type 20, 25, 32, 40, 50, 63 Series MK2 See MK-Z How to Order MK2 10 R 20 B F M9BW Rotary clamp cylinder Heavy duty type Number of auto switches Nil S 2 pcs. 1 pc.

VZ3000

12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 M plug connector (M) Built-in speed controllers L plug connector (L) DIN terminal (D) MAX. 10 MAX. 11 Applicable cable O.D. 3.5 to 7 300 (Lead wire length) (Lead wire length) 300 : With light/surge voltage suppressor 3-3-44 5 Port Solenoid Valve Base Mounted Series VZ3000 Type 41 Manifold: Side Ported

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

CLK1

Weight BAP1-063 BAP2-063 0.03 8 Series CLK1P/CLK1G Construction CLK1P40, 50, 63/With Magnetic Field Resistant Auto Switch Types D-P7, D-P8 Clamp side lock (B) Unclamp side lock (F) Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 No. 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 Description Material Description Material Note Note Free-cutting

Tamper Proof and Flat Head Screw

06T 6 12.8 59 7.4 45 17 AS2051F-05T 3/16" 11.4 52.2 6.2 34.9 16.5 AS3001F-08T 8 15.2 64.4 8.2 45.8 18 AS2051F-07T 1/4" 14.8 7 1.5 13.2 54.4 7.1 35.7 17 19.8 9.5 1.5 AS3001F-10T 10 18.5 71.6 9.8 47.3 21 AS2051F-09T 5/16" 15.2 59.8 8.1 36.7 18 AS3001F-12T 12 20.9 76 11 48.5 22 AS3001F-07T 1/4" 13.2 59 7.4 45.2 17 AS4001F-10T 10 18.5 55.4 21 AS3001F-09T 5/16" 19.8 9.5 1.5 15.2 64.4 8.2 46 18

2/3 Port Valve

OAlowable voltage fluctuation is 10% of the rated voltage. Power consumption W (Holding) Freq. Hz 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 60 40 60 AC DC AC DC 60 60 40 60 60 Apparent power VA Model Power Max. Inrush Holding Note 1) Differ from the operating condition of pressure. Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum). (1) 10 (1) 5 AC 20 10 Min.

MB

MB MBW MBK MBQ MH + Stroke + Adjustable range CA2 ZZ + 2 x Stroke + Adjustable range (A: 25, B: 50) Piston rod and rod end nut made of stainless steel CS1 Bore size (mm) ZZ 175 183 205 205 258 261 MA 21 27 32 32 36 46 MK 10 12 15 15 20 20 MI 24 32 38 38 45 55 MH 44 48 53 53 72 75 ML 18 20 21 21 32 32 MM 10 14 18 18 22 26 32 40 50 63 80 100 Specifications C76 Double acting, Single/Double rod

MXS

) Model F 50 50 50 60 35 60 70 70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83