3

Seal VCW20-15-6 Note) Please order separately. 237 A

EXxx-OMW0014CN

Reserved "0" 7 Reserved "0" 30 No.EX-OMW0014CN-A General diagnostics 2 . 5-3 General diagnostics 2 Bit 0 Module 1 error 0Module 1 1Module 1 1 Module 2 error 0Module 2 1Module 2 2 Module 3 error 0Module 3 1Module 3 3 Module 4 error 0Module 4 1Module 4 4 Module 5 error 0Module 5 1Module 5 5 Module 6 error 0Module 6 1Module 6 6 Module 7 error 0Module 7 1Module 7 7 Module 8 error 0Module

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

5 Port Air Operated Valve SYA3000/5000/7000 Series

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 1/4 (P port) 1.2 (Breathing hole) 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 1/8 (EA, EB port) 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1470 5 Port Air Operated Valve SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Body Ported 2 position double SYA7220-(F2) C8

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

0.01

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.05 0.03 Supply pressure Supply pressure 50 kPa 100 kPa 0.04 30 kPa Hysteresis (mm) Hysteresis (mm) 0.02 0.03 100 kPa 0.02 200 kPa 0.01 200 kPa 0.01 0 0 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 0.05 0.1 0.15 0.2 0.25 Detection distance (mm) Detection

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Air Cylinder

15 D-M9mA n 15 + 40 (n 2) 2 ( n =2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 15 D-M9mAV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) Note) When n is an odd number, an even number that is one larger than this odd number is used for the calculation. 6 JMB Series Operating Range [mm] Auto switch model Bore size 32 40 45 50 56 63 67 80 85 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 3.5 4

MHL2

5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area Flow direction symbols on body AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 4 Metric size JIS symbol 1/8", 5/32", 3/16" 1/4" Tube O.D.

C95Series

~, 65 45 133 30 6 50 3: ; 65 175 9 15 11 ' 45 1202 12' , ~ I so 1 222 I~ ' : .~' , E5063 63 75 ~50_ L3L 35 16.5 52 40 L67 17.5 9 15 " ESoao 80 95 . 60 I 4j 140 16.5 56 50 I 86 10 11 la " 2.5 183 1250 16 , ., , E5100 ,.100_ 1114 70 ,~5 50 L7 .~ 76 O , 9" _ ,'' _11 18 1 le5 ", 1270 20' I'"' Rotating angle ~aore slze A" 8" N+'BO+90~ (mm) 3240 25' W 160' Q 5063 40' 50' 190' SO.I00 30' SS' 175

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm Scale: 80% With auto switch: MDSUA3-S 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60: When using D-90, 90A, 97, 93A 69: When using D-S99, S99V, S9P, S9PV, T99, T99V 15.5 45 29 Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 1 24 2 60 (69) 18.5 34 D-97, 93A 15 30 6 Series MSUA Rotary

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

In this case, a DIN rail which is approx. 30 mm longer than the manifold with the specified number of stations is attached. 5.5 1.25 L Dimension VQZ L = 12.5n + 10.5 35.5 1 23 No. L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

AN

Model Model Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

Free-Mounting Cylinder with Air Cushion Series CU

38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions and Heights for Stroke End Detection D-A9 D-F9 D-F9W A 22 (24.5) 2.8 0.5 B W The dimension in ( ) is for D-A93 type.

Series LQ3 High Purity Fluororesin Fitting

C (E) M L H E C B L 14 20 25 29 37 49 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 10 17 22.5 24.5 27 30 4.8 6 9 10 14 18 3.5 4 5 6 7 8 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3E1A LQ3E2A LQ3E3A LQ3E4A LQ3E5A LQ3E6A M 1/4 L C H (E) Tee Union : LQ3T (mm) Inch Size 2-B Model Tubing O.D.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting