Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting)

D-sub Connector Type: A (15 Poles), Connector Entry Direction: 2 (Lateral), Valve Stations: 04, SUP/EXH Block Fitting Entry Direction: 1 (Standard, Same Direction as Cylinder Ports), SUP/EXH Block Port Size: N3 (ø5/32" One-touch Fitting, Straight), Mounting Option: N [Manifold Direct Mounting Type (10-32 UNF)]

D-sub Connector Type: A (15 Poles), Connector Entry Direction: 2 (Lateral), Valve Stations: 04, SUP/EXH Block Fitting Entry Direction: 2 (Side), SUP/EXH Block Port Size: N3 (ø5/32" One-touch Fitting, Straight), Mounting Option: N [Manifold Direct Mounting Type (10-32 UNF)]

Valve Stations: 04, SUP/EXH Block Fitting Entry Direction: 2 (Side), SUP/EXH Block Port Size: N3 (ø5/32" One-touch Fitting, Straight), Mounting Option: N [Manifold Direct Mounting Type (10-32 UNF)]

D-sub Connector Type: 15 Poles, Connector Entry Direction: Lateral, Valve Stations: 04, SUP/EXH Block Fitting Entry Direction: Standard, Same Direction as Cylinder Ports, SUP/EXH Block Port Size: ø5/32" One-touch Fitting, Straight, Mounting Option: N [Manifold Direct Mounting Type (10-32 UNF)]

D-sub Connector Type: 15 Poles, Connector Entry Direction: Lateral, Valve Stations: 04, SUP/EXH Block Fitting Entry Direction: Side, SUP/EXH Block Port Size: ø5/32" One-touch Fitting, Straight, Mounting Option: N [Manifold Direct Mounting Type (10-32 UNF)]

Table of Contents

36 42 48.5 DC 34 37.5 46 54 60.5 BB 72 82 104 120 140 BA 52 62 70 86 106 CB 20 22 29 30.5 37.5 DO 42 47.5 60 70 80.5 BD 24 30 32 40 50 BC 52.6 62.6 70.6 86.6 106.6 CA 8 9 9 12 14 AD 35.5 38.5 46.5 51 70 K 9 9 10 11 12 AC 3 3 3 4 5 J 20 21 24 28 32 AA 58 64 77.5 89 116 AB 55 61 74.5 85 111 H 10.4 13.5 17.7 19.5 23.5 5 7 8 10 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 R 44 53 62 76 95

15

8 70 50 4 44 69.8 83.5 M4 x 12 M5 x 45 11 NX M5 x 0.8 9 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.7 69.8 83.5 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 69.8 83.5 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 69.8 83.5 M3 x 12 M5 x 45 12 NM2 M4 x 0.7 8 50 36* 4.5* 38.5 69.8 83.5 M4 x 12 M5 x 25 10 32

Air Slide Table

) depth 2.5 7.4 8.5 A 8.5 4.2 8 A NN x M5 x 0.8 tapped through hole 5 HB GB Cross-sectional view A-A 39 29 11 Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z

Free Mount Cylinder Series CU

(Example): CDU20-10S Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 CU Nil Standard stroke (mm) TN TF 6, 10, 16 20, 25, 32 5, 10, 15 CQS CQ2 Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

AD 35.5 38.5 46.5 51 70 J 20 21 24 28 32 AA 58 64 77.5 89 116 AB 55 61 74.5 85 111 AC 3 3 3 4 5 H 10.4 13.5 17.7 19.5 23.5 5 7 8 10 11 MHW -X P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 11 14.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5

Micro Mechanical Valve Series VM1000

1.5 R port (3 port only) Symbol 2 port (A) 2 12 10 1 (P) 44 25.4 17 (A) 2 3 port 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 14 8.5 12 10 1 (P) 3 (R) Panel mounting hole * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Max. 6 Push button (Extended) VM122-M5-32 (R, B, G, Y) A VM132-M5-32 (R, B, G, Y) A 23 38 T.T. 3 1.5 1.5 (75.6) (52.1) 23.5 22.1 30 10.5 R port (3 port only) Symbol 2 port (A) 2

MY1

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

Air Cylinder

[mm] Bore size A B C D F GA GB H LB LC LH LT LX LY LZ MM NA NB NC NN S SA T X Y Z ZA 6 15 12 14 3 8 14.5 5 28 15 4.5 9 1.6 24 16.5 32 M3 x 0.5 16 9.5 7 M6 x 1.0 51.5 49 3 5 7 79.5 77 10 15 12 14 4 8 8 5 28 15 4.5 9 1.6 24 16.5 32 M4 x 0.7 12.5 9.5 M8 x 1.0 46 5 7 74 16 15 18.3 20 5 8 8 5 28 23 5.5 14 2.3 33 25 42 M5 x 0.8 12.5 9.5 M10 x 1.0 47 6 9 75 52 Air Cylinder: Standard Type