Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes, Lead Wire: w/M12 -M8 Conversion Lead Wire, 0.1 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket: None, Calibration Certificate
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: G, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket: None, Calibration Certificate
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes, Lead Wire: w/M12 -M8 Conversion Lead Wire, 0.1 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket: None, Calibration
Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification/Temperature Sensor: Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket: None, Calibration
Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: G, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C, Bracket: None, Calibration Certificate
HEC-OM-Y008 If the fluid is left inside, an accident and damage can result during transportation. 700 Warning If instructions are not followed there is a possibility of serious injury or loss of life. 700 Sep W yW ZW AW BW CW DW . Ambient temp. 35 deg.C Heating Capacity W Heating Capacity W Ambient temp. 35 deg.C 600 600 Oct X yX ZX AX BX CX DX . Nov y yy Zy Ay By Cy Dy .
If it must be used under such conditions due to unavoidable circumstances, contact SMC beforehand. w Do not use it with anything other than dry air (such as air containing moisture).
190 12 TBR-4 240 Spare Parts W (Dimension) Part no.
: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment
Adjustment: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Individual Supply: L (Manifold Individual Supply Spec.)
Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm), Light/Surge Voltage
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Nozzle Diameter: ø1.0, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor
Nozzle Diameter: ø0.5, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)
Nozzle Diameter: ø1.5, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: S (0.45 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual
Nozzle Diameter: ø0.7, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor