Electric Actuators

284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100

In-line Air Filter

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

IP80-OM00019

) 9 4. 23 10 A * 3-1-2 3 2 IP8000 OUT2 OUT1 () * OUT2 OUT1 * 11 A * 3-2-3 DA RA DA RA 3 IP8000 OUT1 OUT2 RA DA OUT1 OUT2 * * 12 5. 5-1 2M4 M4 (1) (+)(-) (+) (-) G1/216.5mm (2.636.64 mm2) (2) 14A B( B), M4 14 5-2 (1) (+)(-) (+) (-) G1/220mm G(PF)1/2 (0.51.5mm2) M4 (2.636.64mm2 ) 15 13 6.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

VER2000/4000

port regulator) ARB310-00-B ARB210-00-B Can be made into manifold with series VV72.

CC-Link-E

ITV2OM00078C 10

HEC-OM-U015

Wetted materials Stainless steel, EPDM, NBR, Ceramic, PPE, PPS, Carbon, Polyethylene, POM 10 Temperature Alarm Common cable connected to this connector. Required flow rate 10 to 15 L/min Facility water 11 Temperature Alarm b contact 3.3.2 Heating Capacity Temperature range 10 to 35 C 5 (CLOSE During Alarm) system Only trained personnel should handle or operate the product.

Digital Flow Switch (Integrated display type)

Analogue output A B C Voltage output 1 V 1.5 V (1.4 V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA : The value in ( ) is when PF2W711 is used. Rated flow range Model Min. Max. PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

8.5 25 Finger closing port M3 x 0.5 M3 x 0.5 25 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 Finger opening port 44 +0.02 2 x 3 0 depth 6 31 (A, B common view) 0 9h9-0.036 4 x M3 x 0.5 thread depth 6 2 x 4.2 (A, B common view) 9.7 4.7 1 19.5 10.1 5.8 4.7 3 18 33.5 (36.5) 11.4 2 2 10 M3 x 0.5 thread depth 4 Auto switch mounting groove 5 15 Open: 11, Closed: 8 Vacuum suction

VQZ Series

Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 8 No.VQZ100V-OMK0002-B VQZ Series/ / / /Specific Product Precautions 1 Be sure to read this before handling How to Use Plug Connector Manual Override 1.

Series 10-SV ® EX500 Decentralized Serial Wiring

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

CRB2-OM00001

Secure either Body (A) or Body (B) and push out Vane Shaft , then separate Body (A) from Body (B). Remove Vane Shaft , Stoppers and . [How To Assemble] Mount O-ring and Vane Shaft to Body (B) . Mount Stopper Packing to Stopper . Mount Stoppers and to Body (B) . (Note: Be careful of stopper position) Insert Body (A) into Vane Shaft .

Direct Operated 3-port solenoid valve

Remedy -10 -1VT307-OMQ0002-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

ALF400 to 900, ALT-5/-9

Number of distribution ports 6 6 Oil distributor (VA) (VB) VB6-6 Distribution 4 6 8 4 6 10 16 4 port 6 port 8 port 4 port 6 port 10 port 16 port A B Both sides exhaust One side exhaust VA4-6 Dimensions VA-6 VB-6 4-6.5 hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing

Digital Flow Switch (Remote type sensor unit)

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

CEx-OMQ0010

ISO 10218-12006Robots for industrial environments-Safety requirements-part1:Robot IEC 60204-1:Safety of machinery Electrical equipment of machines-Part1:General requirements JIS B 8370: JIS B 9960-1:-(1:) JIS B 8433-12007-1 *2) 1. 2. 3. a. b. c 4. a. b. c d. 3. 4. a0~60 b25~85%RH c d e 5. f g. h i 6.