SMC Corporation of America
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Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 8 No.VQZ100V-OMK0002-B VQZ Series/ / / /Specific Product Precautions 1 Be sure to read this before handling How to Use Plug Connector Manual Override 1.

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed 8 One-touch fitting 5/16" One-touch fitting 10-SV1000 10-SV1000 10 One-touch fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 12 One-touch fitting 3/8" One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

Secure either Body (A) or Body (B) and push out Vane Shaft , then separate Body (A) from Body (B). Remove Vane Shaft , Stoppers and . [How To Assemble] Mount O-ring and Vane Shaft to Body (B) . Mount Stopper Packing to Stopper . Mount Stoppers and to Body (B) . (Note: Be careful of stopper position) Insert Body (A) into Vane Shaft .

Remedy -10 -1VT307-OMQ0002-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

Number of distribution ports 6 6 Oil distributor (VA) (VB) VB6-6 Distribution 4 6 8 4 6 10 16 4 port 6 port 8 port 4 port 6 port 10 port 16 port A B Both sides exhaust One side exhaust VA4-6 Dimensions VA-6 VB-6 4-6.5 hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing

L/min) PF2W504(T) A 0.5 4 PF2W520(T) B 2 16 PF2W540(T) C 5 40 PF2W511 D 10 100 Analogue output A B C Voltage output 1 V 1.5 V (1.4V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA The value in ( ) is when PF2W511 is used.

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

ISO 10218-12006Robots for industrial environments-Safety requirements-part1:Robot IEC 60204-1:Safety of machinery Electrical equipment of machines-Part1:General requirements JIS B 8370: JIS B 9960-1:-(1:) JIS B 8433-12007-1 *2) 1. 2. 3. a. b. c 4. a. b. c d. 3. 4. a0~60 b25~85%RH c d e 5. f g. h i 6.

After compiling is completed, click the icon (b) Download to Module and download. Now the configuration is complete. (a) (b) STEP7 software is manufactured by Siemens AG.

-06H -08H -10H -12H 21 35 35 35 30 35 35 35 10 15 30 35 10 18 21 35 35 35 10 22 35 35 1.2 1.9 2.1 2.1 1.8 2.1 2.1 2.1 0.5 0.8 1.8 2.1 0.5 1.0 1.2 1.9 1.9 2.1 0.5 1.3 1.8 2.1 0.4 0.4 0.5 0.5 0.5 0.5 0.5 0.5 0.4 0.4 0.5 0.5 0.4 0.4 0.4 0.4 0.4 0.5 0.4 0.5 0.5 0.5 R1/8 R1/4 R3/8 R1/2 Rc1/8 Rc1/4 Rc3/8 Rc1/2 6 (1/4") 8 (1/4") 10 (3/8") 12 (1/2") 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 6 8 10 12 4.2

P_1 = A (A B)/4 A = maximum pressure value H_1 = (A B)/2 B = minimum pressure value For OUT2 set-up, above P_1, n_1, and H_1 become P_3, n_3, and H_2 respectively. Fine adjustment mode (Fine adjustment function of display value) 1. Press the button and buttons simultaneously for longer than two seconds in the measurement mode.

4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.

Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.