Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

4-channel Flow Monitor ( compatible)

Refer to "Error indication function" on page 99 for details of the errors. Error displayed Switches the switch output to ON/OFF when an error is displayed. Refer to "List of output modes" on page 38 for operating conditions. Refer to "Error indication function" on page 99 for details of the errors.

PFxx-OMA1007

Function Setting on Hub Display 87 Function selection mode 87 Default setting 88 F0 Reference condition/Units selection function 89 F3 Select digital filter 91 F6 Fine adjustment of display value 92 F13 Setting for reverse display mode 93 F14 Zero cut-off setting 94 F16 Measurement display setting 97 F30 Setting of accumulated value hold 98 F40 Setting for standby/auto isolation function 99

CG1

27.5 49 49 74 74 40 40 65 65 15 24 90 30 99 124 124 30 115 115 50 50 75 75 40.5 40.5 65.5 65.5 15.5 25 90.5 33.5 100 125 125 33.5 115.5 115.5 54.5 54.5 79.5 79.5 43 43 68 68 18 29.5 93 38 38 104.5 129.5 129.5 118 118 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 27.5 27.5 100.5 D-G5 D-G5 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 30 30 100.5 125.5 125.5 116 116 D-K5 D-K5 51.5 51.5 76.5 76.5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 636 3 Port Pilot Solenoid Valve 10-SYJ700 Type 40 Manifold: Bottom Ported/10-SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 5 L2 L1 53.5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x 1.5 77 Up to 1000 Up to 2000 72 218 46 14 11.5 4 4 128 17 25 45 45 M10 x 1.5 22 40 G 3/8 19 10 M20 x 1.5 99

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LS + Stroke LX A + Stroke LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX

3

Head flange CQS-F012 CQS-F016 MKZ-F020 MKZ-F025 MK2T-F032 MK2T-F040 MK2T-F050 MK2T-F063 MKZ-RF012 MKZ-RF016 MKZ-RF020 MKZ-RF025 MKZ-RF032 MKZ-RF040 MKZ-RF050 MKZ-RF063 12 16 20 25 32 40 50 63 Special hexagon socket head cap screw (4 pcs.) 390 B Rotary Clamp Cylinder: Standard MK Series Weight Clamp Arm Mounting Bore size (mm) Unit: g Caution Clamp stroke (mm) 10 20 30 50 12 69 84 99 16 94

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Port size (nominal size B) 1.5MPa 5 to 60C 99% 1/8, 1/4, 3/8 1/4, 3/8, 1/2 Ambient and fluid temperature Dehumidification rate 0.38 0.55 Weight (kg) Note) Maximum flow rate at pressure 0.7MPa 2 years, or when pressure drop reaches 0.1MPa Element life Note) With auto drain is 0.15MPa 21 Related Products Related Products (Refer to the individual product catalogs for further details.)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Cross sectional area 0.23mm2 3.5 to 7 85.5 78 60 M type plug connctor (M) R 3 1 P (Lead wire length) 82.5 94.5 61.5 300 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light R 3 1 P Equation L1=19n+11 L2=19n+23 n: Stations (Max. 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200

MGP

Part number 16 26 to 99 Applicable stroke (mm) 20 to 63 26 to 199 80, 100 51 to 199 Part no.: MGPM2035AXC19 A collar 15mm in width is installed in a MGPM2050A. C dimension is 112mm. Example Note 1) Intermediate strokes (in 1mm increments) with a special body are available by special order.

Free Mount Cylinder Series CU

(g) Stroke (mm) CQS Model 60 40 30 25 20 15 10 5 50 70 80 90 100 CQ2 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D RQ 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D CQM 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D MU 132 (165) 145 (182) 158 (195) 171 (208) 184 (221)

EXxx-OMY0004

PROFIsafe errors . 99 16.3. Acknowledging an error for PROFIsafe . 99 17. Appendix A: glossary . 100 18. Appendix B: F-Parameters . 102 19. Appendix C: i-Parameters . 103 20. Appendix D: Diagnostic messages for parameter errors for PROFIsafe .. 104 21. Appendix E: Checklists . 105 22. Appendix F: Safety Characteristics. 109 23. Appendix G: EX245-FPS Timing Values . 110 24.

CXS

0.1 0.15 0.2 0.3 0.4 0.5 0.6 0.7 33.6 22.4 28.0 8.4 39.2 11.2 16.8 OUT 4 CXSJ6 21.7 18.6 12.4 15.5 4.6 6.2 9.3 IN 31 110 94.2 62.8 78.5 OUT 31.4 47.1 15.7 157 6 CXSJ10 70.0 IN 60.0 40.0 50.0 20.0 30.0 10.0 100 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm) Weights (g) Standard stroke (mm) Model 75 10 20 67 50 30 40 57 47 77 CXSJM6 87 68 58 48 78 CXSJL6 88 129 114 99

LJ1H

cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100 W 5 156 168 Dimensions [mm] LA LB LC 99

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100 W 5 156 168 Dimensions [mm] LA LB LC 99

Title not found

99$!! Eq1or) I AF20 to 60, AR20K io 60K (w,l! ljmjlllqleto') AR20 to 60, AR20K to 60K _ Nol 1)Bracketassembty,s ml molnled atthe tne oj shipment Dlt @ther packaged logether ur lh rhe @gulator Nole2)Nlounlinalhreadslorpressurqalge:A810 1/16 AF201o30-1rB AF40lo60 1/4.

MXQ

Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 89 89 99