Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

R.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under

Multistage Ejector Series ZL112/212 1

kPa 13.3 kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

VT315-OMH0005

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT315**-OMH0005-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 VT315**-OMH0005-A VT315 Series VT315 Series VT315 Series VT315 Series 3 3 3 3 / / / / / / / / 3 () C-R ( )C-R DC 5% () () () ( ( ( ( ) ) ) ) () AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC

AFF

J Drain guide female threaded 4 1 4 1 1 2 2 R IN-OUT reversal direction T With element service indicator Accessory 4 Drain piping and piping for a stop valve such as ball valve are required.

Air Tank Series AT 1

R 1/2 R 3/4 R 11/4 R 2 R 1 Accessory (2) Rc 1/2 Valve for drainage (1 pc.) Pressure gauge (1 pc.) R 3/8 x 100 M16 x l 250 M16 x l 300 M24 x l 500 M16 x l 500 Anchor bolt (4 pcs.) Note 1) Manufactured upon receipt of order Note 2) The accessories should be mounted by user.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

NVKF

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

ZSE1/ISE1

Variable hysteresis 1 to 10% of set pressure (Variable) Easy and simple wiring 16-6-1 2 Series ZSE1/ISE1 How to Order Operating pressure range/ Setting pressure range Piping specifications R 1/8 NPTF 1/8 01 T1 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) threaded.

Series GS40 Digital Pressure Sensor 1

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

Series GS40 Digital Pressure Sensor 1

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

IC

0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

IC

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

Series GS40 Digital Pressure Sensor

G Lead wire length Digital pressure sensor 0.6 m 5 m Nil X202 PPA A variety of installation options Screw includedM5, Mounting bracket M5 type only 8 1 R , 4 1 R Unit specifications AL With the unit switching function Note) Nil M Port size Fixed in SI unit (MPa) M5 (Female thread) R1/8 R1/4 M5 01 0 Note) With unit switching function is not permitted to sell for the domestic use in Japan,

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R 18 M10 x 1.5 80 22 M12 x 1.75 100 22 M12 x 1.75 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Rod end

Direct Operated Precision Regulator Modular Style Series ARP3000 1

1 Direct Operated Precision Regulator Modular Style Series ARP3000 Standard Specifications F.R.L. Setting sensitivity: 0.001 MPa Can be connected as a module to a mist separator.

3 Way Direct Acting NVKF 300 Series

(Bottom Ported) lType 40 Manifold NVV3KF3-40-Stations-0 1 T inch (mm) L: Dimensions '-{ 1 2 3 5 6 7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81