Air Slide Table Series MXQ

Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 Z 77 77 87 97 113 145 188 213 M 78 78 88 98 114 146 189 214 ZZ 89 89 99

1

40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port Thread: Rc1/8, NPT1/8 Female Rod End [mm] [mm] Bore size G S ZZ Bore size ZZ 20 5 37 (42.5) 78 (83.5) 20 63.5 (69) 25 5 37.5 (43) 81.5 (87) 25 64 (69.5) 32 5 38 (44) 82 (88) 32 64.5 (70.5) 40 5 44.5 (50.5) 95.5 (101.5) 40 72 (78) Bore size G S ZZ Bore size ZZ 20 7.5 49 (54.5) 90 (95.5) 20 75.5 (81) 25 7.5 49.5 (55) 93.5 (99

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

width across flats 22 6 6 Hexagon width across flats 24 70 25 70 4 x M5 x 0.8 Width across flats 60 4 x M5 x 0.8 G 11 11 G Width across flats 60 F F E E Y Y 8 10 40 40 C C A A B D B D Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT100HB-A16 ZPT100HB-B12 100 103 69 107 47.5 60.5 90.5 35.5 M12 x 1.75 100 103 69 107 47.5 60.5 35.5 ZPT125HB-A16 -B16 125 129 89 135 56 69 99

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99

Rubber seal 5 Port Solenoid Valve Series SYJ7000

DIN 65.1) 63 (DIN 64.3) R P R B B B B B 122 [126.4] 19 19 19 60 31.5 22 A A A A A 1/4 (P, R port) 13.8 (For DIN: 15.1) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73 [80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 106.5 99

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103 149 Double C6 ( ) 6 One-touch fitting SY560--C6 Closed center 3 position 102 109 155 Exhaust center Pressure center Single 72 76 99

Stainless Steel 316

10.6 20.5 18 5/32 21.5 12 25.5 28 6 KQGT03-N01S NPT1/8 D A 19 10 25 39 4.5 KQGT07-32 10-32UNF L2 22.5 12 13 22.1 27.4 42 18.8 KQGT07-N01S 1/4 NPT1/8 11 H Connection thread (In case of R) 14 26.5 29.7 50 KQGT07-N02S NPT1/4 12 23.9 30.6 61 KQGT09-N01S NPT1/8 L1 L1 2 x Applicable tubing 14 15 27.9 24.9 32.9 70 20.9 26.3 KQGT09-N02S 5/16 NPT1/4 M M 29.9 34.6 85 KQGT09-N03S NPT3/8 D 29.7 35.9 99

Actuator Position Sensor

Range Setpoint 1 (SP1) 250 12.5 mm D-MP025 0 to 500 Setpoint 2 (SP2) 230 11.5 mm Measuring range 0 to 500 25 mm Setpoint 1 (SP1) 500 25 mm D-MP050 0 to 1000 Setpoint 2 (SP2) 480 24 mm Measuring range 0 to 1000 50 mm Setpoint 1 (SP1) 1000 50 mm D-MP100 0 to 2000 Setpoint 2 (SP2) 980 49 mm Measuring range 0 to 2000 100 mm Setpoint 1 (SP1) 2000 100 mm D-MP200 0 to 4000 Setpoint 2 (SP2) 1980 99

MQQ

33.5 48 8 5 M LY 16 58.5 3.2 48 42 62 9.2 5.8 LH CY 20 64 3.2 52 46 66 10.7 5.8 25 68.5 3.2 57 57 71 11.2 5.8 X X LG Y Y 4-LD LT MQQ M 28 88 3.2 64 64 78 11.2 7 LS + Stroke LX A + Stroke LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

. < >: AC 3.5 to 7 85.5 78 60 M plug connector (M) R 3 1 P (Lead wire length) 94.5 83 Cover diameter 1.5 Cross section 0.23 mm2 300 61.5 <66.5> Indicator light 1 P 3 R < >: AC Formula L1 = 19n + 11 L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 49 61 87.5 98 68 80 100 110.5 87 99 125 135.5 106 118 137.5 148 125 137 162.5 173

Air Cylinder

28 3.2 35.8 42 16 28 93 (101) 114 (122) 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 98 (106) 119 (127) 32 54 10 6.6 35 40 4.5 49.4 48 22 28 101 (108) 125 (132) 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 118 (125) 146 (153) 50 79 20 9 50 60 6 72.4 64 36 36 136 (147) 168 (179) 63 96 20 11 60 74 8 90.4 74 46 46 136 (147) 173 (184) Bore size Z ZZ 20 71 ( 79) 92 (100) 25 72 ( 80) 93 (101) 32 75 ( 82) 99

Electric Actuator

0.8 6.5 4 5 101 to 124 MC 125 to 200 Detailed figure of section XX ML + Stroke MA L 201 to 400 20 to 39 40 to 100 XB 32 8.5 5 6 M6 x 1 101 to 124 XA XA H9 A B C Foot/LEY ll -lllL 16 25 32 125 to 200 201 to 500 Enclosed parts Foot Body mounting bolt Foot [mm] Stroke range (mm) LT LL A LS LL LS1 LD LG Size 10 to 100 106.1 76.5 16 16.1 6.6 2.8 5.4 101 to 300 126.1 96.5 LG 15 to 100 136.6 99

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

Vacuum

How to Order Zprseriesf willill,'-,"J".1.. ... .. ... .3i ZpF Seriesf Withor.]t_Buffer. .99 ' w r r n H U e r . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i 0 0 Zpyseriesf willilr?

4-channel Flow Monitor ( compatible)

Refer to "Error indication function" on page 99 for details of the errors. Error displayed Switches the switch output to ON/OFF when an error is displayed. Refer to "List of output modes" on page 38 for operating conditions. Refer to "Error indication function" on page 99 for details of the errors.

PFxx-OMA1007

Function Setting on Hub Display 87 Function selection mode 87 Default setting 88 F0 Reference condition/Units selection function 89 F3 Select digital filter 91 F6 Fine adjustment of display value 92 F13 Setting for reverse display mode 93 F14 Zero cut-off setting 94 F16 Measurement display setting 97 F30 Setting of accumulated value hold 98 F40 Setting for standby/auto isolation function 99

CG1

27.5 49 49 74 74 40 40 65 65 15 24 90 30 99 124 124 30 115 115 50 50 75 75 40.5 40.5 65.5 65.5 15.5 25 90.5 33.5 100 125 125 33.5 115.5 115.5 54.5 54.5 79.5 79.5 43 43 68 68 18 29.5 93 38 38 104.5 129.5 129.5 118 118 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 27.5 27.5 100.5 D-G5 D-G5 50.5 50.5 75.5 75.5 41 41 66 66 16 25.5 91 30 30 100.5 125.5 125.5 116 116 D-K5 D-K5 51.5 51.5 76.5 76.5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Applicable cable O.D. 3.5 to 7 Station L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 636 3 Port Pilot Solenoid Valve 10-SYJ700 Type 40 Manifold: Bottom Ported/10-SS3YJ7-40Stations -01 [ ] for AC Grommet (G) 5 L2 L1 53.5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x 1.5 77 Up to 1000 Up to 2000 72 218 46 14 11.5 4 4 128 17 25 45 45 M10 x 1.5 22 40 G 3/8 19 10 M20 x 1.5 99

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com LS + Stroke LX A + Stroke LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX