Body Class: 5 (Class 5, Orifice ø20), Valve Type: 0 (Normally Closed), Port Size: 06 (3/4), Thread: N (NPT), Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment), Specification: V (Vacuum)
Body Class: Class 5, Stations: 2 Stations, Port Size: 06 (3/4, Class 5), Thread: N (NPT)
Body Class: Class 5, Stations: 4 Stations, Port Size: 06 (3/4, Class 5), Thread: N (NPT)
Body Class: Class 5, Stations: 5 Stations, Port Size: 06 (3/4, Class 5), Thread: N (NPT)
Body Class: Class 5, Stations: 3 Stations, Port Size: 06 (3/4, Class 5), Thread: N (NPT)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
.: B (-40 to 60°C), Silencer: S (Silencer)
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)
Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)