Fieldbus System

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

CRQ2

M ab BA BA BB D (AU)Max.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J K 138 LEPS10m-25m 152.5 20 22 30 29 20 29 39 88.2 61.8 LEPS10m-50m 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10Lm-25m 124 138.5 20 22 30 29 20 29 39 88.2 47.8 LEPS10Lm-50m 149 163.5 24 43 34 50 24 50 60 113.2 19 Series LEPY/LEPS Specific Product Precautions 1 Be sure to read before handling.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Technical Data 1219 MY1H Series Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AV Auto switch model D-A9 D-A9V A A Bore size A A 25 32 40 81 85 112.5 116.5 133.5 137.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

AW

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MDHR2-20, 30 MDHR2-10, 15 H H L L Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Auto switches of D-M9N, D-M9P and D-M9B are used. Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Max. Protrusion of Auto Switch from Edge of Body: L, H Max.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

CKZ2N

D E E F G 6F7+0.010 +0.022 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 9 through 30 0.025 30 0.025 I 9 through M6 x 1.0 H I 15 0.03 15 0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.

MHC2

MHC2-10D JIS Symbol Double acting How to Order D 20 MHC2 Y59A S Number of auto switches Single acting Angular style air gripper 2 pcs. 1 pc. S Nil Bore size 10 mm 10 Action Auto switch Single acting S 16 mm 16 20 mm 20 25 mm 25 Double acting D Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

MHC2

MHC2-10D JIS Symbol Double acting How to Order D 20 MHC2 Y59A S Number of auto switches Single acting Angular style air gripper 2 pcs. 1 pc. S Nil Bore size 10 mm 10 Action Auto switch Single acting S 16 mm 16 20 mm 20 25 mm 25 Double acting D Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Modular Type Lubricators Series AL

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Manifold Specifications

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

MHC2-10 MHC2-16 MHC2-20 MHC2-25 8 6 7 6 6 5 Handling of Mounting Brackets: Precautions When auto switch is set on the mounting side as shown below, allow at least 2 mm run off space on mounting late since the auto switch is protruded from the gripper edge. 4 3 (mm) Auto switch model D-M9 D-M9W D-M9(V) D-M9W(V) Air gripper model MHC2-10 MHC2-16 MHC2-20 MHC2-25 7.5 5.5 Run off space 2 mm or

Wedge Cam Operation Provides

20 D 1 F Long stroke model MHKL 2 20 S D 1 F F9NL Number of auto switches Number of fingers _ S 2 1 2 2 fingers Bore size 12 16 20 25 12mm 16mm 20mm 25mm Action D S C Double acting Single (Normally open) Single (Normally closed) Finger material _ 1 Carbon steel Stainless steel Dust cover material _ Chloroprene rubber (CR) Fluoro rubber (FKM) Silicon rubber (Si) F S Auto switch _ Without

Water-cooledThermo-chiller

Breaker Operating Characteristics Common for all models 4 h 2 h 1 h 5 s 10 s 20 s 30 s 1 min 2 min 4 min 6 min 10 min 14 min 20 min 30 min Max.

Process Valve Series VNA

Valves Valve size 1/2/3/4 Valve size 5/6/7 SF4 5 D 23 Q 5 D VO307 00 Q CE compliant CE compliant 5 D SF4 5 D 23 Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only VO301 00 With surge voltage suppressor Manual override Coil rated voltage Coil rated voltage None Surge voltage suppressor (Except DZ, DL) Nil Non-locking push type Non-locking push type A (projecting) Nil

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

K 4 70 190 170 200 11 6 x K (6 places) 93 170 200 418 Guide Table Series MGF Minimum Auto Switch Mounting Stroke (mm) Applicable auto switch model No. of auto switches mounted D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-Y7WV D-Z7 D-Z8 D-Y69 D-Y7PV D-Y59 D-Y7P D-Y7W D-Y7BAL 5 10 15 20 10 5 10 15 20 1 pc. 10 10 20 25 15 10 10 15 20 2 pcs.

SMC Pneumatic Clean Series

to 25 6 to 25 10/16 15/32 Bore size 610 6 D-C7/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9

C95Series

I' SU tl}El absorber : Sign : Red Green: Red: D-A56 .,,'""pan" \ . position D-F59 D-F5PW D-F59F Solid State Type Internal Circuit D-J59W D-F5P D-F5LF ~~ e Black D-F58A D-J59 D-F5NT AIIID SWitches Series C95 Suppon b racketexceptcenter tll.llYioo Center trunnion , Minimum Allowable Stroke When Mounting Auto Switches .. .