ZQ Description Material Model Color Zinc die-cast AR10-A 1 Body White Aluminum die-cast AR20(K)-B to AR60(K)-B AR20K-B to AR60K-B (Regulator with Backflow Function) AR10-A Polyacetal White AR20(K)-B to AR40(K)-B 2 Bonnet A-A Aluminum die-cast AR50(K)-B/ AR60(K)-B y A Replacement Parts [AR10-A] 2 OUT 1 I N No. Description Material Part no.
A AP3150 Indicator switch AP3157 1.87 (47.5) AP3150 1.88 (47.8) AP3100 2.12 (53.8) Indicator switch (Option) AP3157 4.46 (113.3) AP3150 3.94 (100.1) AP3100 3.74 (95.0) 0.715 (18.2) A A AP AP 2.0 (50.8) 2 x 10-32 UNF depth 0.35 (8.9) (Mounting hole) SL 1.5 (38.1) AZ Connections inch A 45 (mm) AK FV4 MV4 TW6 FV8 MV8 TW8 FV12 MV12 TW12 2.00 (50.8) BP 1.375 (34.9) 2.425 (61.6) 1.79 (45.4) A A
Plug that A port to avoid mistaking B port for the A port.
Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top
HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.
The continuous duty AC type is equipped with a rectifier, so a diode will be provided. Construction Symbol (A)2 (R)3 1(P) Component Parts Material Aluminum die-casted No.
A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5
Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure
CAT.ES13-7 A Exhaust Cleaner for Clean Rooms Series AMP An exhaust cleaner that can be used inside a clean room. Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult SMC in advance, as this will differ depending on the operating conditions.)
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)
Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid
This prevents discharge to the outside for a fixed time. Element service indicator (optional specification) With indicator function The element life (standard) can be visually confirmed. First element (main element) Element service indicator Element clogging is detected by a pressure differential, and indicated by a red symbol.
ASS AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 ASR ASQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FG AS331FG AS421FG AS431FG
Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1
Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective
RoHS Blow Gun Series VMG How to Order VMG1 1 02 32 W C With nozzle cover (Only for male thread nozzle, 6 extension nozzle) Piping entry Bottom Top 1 2 C CF None With nozzle cover/HNBR With nozzle cover/Fluororubber Body color Nozzle White Dark blue W BU Nozzle size Type Symbol Nozzle part no.
Aluminum alloy Bottom plate Hard anodized Aluminum alloy O-ring NBR Retaining ring Nickel plated Carbon tool steel Bolt Nickel plated Carbon tool steel Ball bushing 3 Compact Low Friction Cylinder Metal Seal Series MQQ Mounting Mounting bolts a) A type mounting (when using the mounting plate threads) C C D D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting
A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)