Process Pump

operates and diaphragm starts reciprocation. 10.

XLA Series

A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

MRQB-OM0002

4 [deg] 40 7 3 80100 24.5(25) 25 32 170190 32(32.5) 32.5 B [mm] 40 170190 41(41.5) 41.5 80190 31.5(32) 32 ( ) : D-A72A7HA80H 25 7. 7. 7. 7. 7.1 7.2 (7.1)A A ON A B A OFFB ON (7.2)A A ON A B A OFFB ON 26 8. 8. 8. 8. 8-1

DOC1013639

Within -0.2 mm -10- 6.

VFR2000 Series

(VFR2 00) (VFR2 10) Indicator light and surge suppressor Indicator light and surge suppressor surge suppressor Indicator light and Plug position B port A port Type of actuation N.C N.O Table 1.

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

K 20 m roll 100 m reel Model TRB0604 TRB0806 TRB1075 TRB1209 M 6 8 10 12 Inner tubing O.D. (mm) Inner tubing I.D.

AW20-B to AW60-B

Note 2) Drain guide is NPT1/8 (applicable to the AW20(K)-B) and NPT1/4 (applicable to the AW30(K)-B to AW60(K)-B). The auto drain port comes with 3/8" One-touch fitting (applicable to the AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the AW20(K)-B) and G1/4 (applicable to the AW30(K)-B to AW60(K)-B).

Digital Flow Switch (Remote type sensor unit)

C 10 100 PF2A521 D 20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

High Vacuum L Type Valve

Step 6 Bolt b 3 Tightening torque of bolt b Nm 1 2 Valve Tightening 4 size torque Handle assembly XLH-16 0.7 -25 1.5 -40 2.5 -50 6 Tightening torque of bolt a Nm Bolt a Valve Tightening size torque Body All sizes 0.3 Cover Heater Tighten Bolt b in numerical order to assemble the Body and the Handle assembly with the valve opened a little in numerical order.

HEAVY DUTY STOPPER CYLINDER

B Sealant tape Expose approx. 1 thread Figure-3 3-3.

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Switches

(B contact) Standard GXL-8FB 3 wire N.C. (B contact) Varying frequencies GXL-8FIB 2 wire N.O. (A contact) Standard GXL-8FU 2 wire N.C. (B contact) Standard GXL-8FUB Switch specifications (SUNX Corporation) GXL-8F(I)(B) GXL-8FU GXL-8FUB Part no.

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

Process Pump

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of

1

Special electrical entry direction Symbol Electrical entry direction 90 90 IN OUT A 180 180 IN OUT B 270 270 IN OUT C Replacement Parts Gasket Part No. for DIN Connector VCW20-1-29-1 (For Class B Coil) DIN Connector Part No. B Coil> Electrical option Rated voltage Connector part no. 24 VDC Lead Wire Assembly for Flat Terminal (Set of 2 pcs.)

SY3000/5000/7000 Series Plug-in Type

Applicable Fittings: Series KQ2H, KQ2S Series KJH, KJS 16 SY3000V-OMM0002-B Valve Construction 17 No.SY3000V-OMM0002-B 18 No.SY3000V-OMM0002-B 19 No.SY3000V-OMM0002-B TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.