Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50, .09369

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50, .00000

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VAC PAD (BELLOWS) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50,

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VAC PAD (BELLOWS) W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50,

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50, .22220

Size: 3 (1/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø6, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 3 (1/8 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: w/o Sealant (M3,M5,U10/32), Option: C (Spatter Cover)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø8, Sealant: w/o Sealant (M3,M5,U10/32), Option: None, Made to Order: None, Lock Nut: J (Round)

Size: 4 (1/4 Basis), Style: 1 (Union Tee), Thread: M3, M5, U10/32, R, Port Size: 02 (R1/4), Tube Size: Ø10, Sealant: w/o Sealant (M3,M5,U10/32), Option: None, Made to Order: None, Lock Nut: J (Round)

Laterial vacuum entry without buffer series, Pad diameter: 02, 04, 06, 08, 10, 13, 16, 20, 25, 32, 40, 50 (mm), Pad style: flat, flat w/ribs, deep, bellows, Material: NBR, silicon rubber, urethane rubber, flourine rubber, EPR, Rotating or non-rotating, Multiple vacuum entry/mounting thread diameters, VACUUM PAD W/O BUFFER, VACUUM SERIES, ZP VACUUM PAD, VL, ZP PAD SIZE 32-50, 0.5984

AC Servo Motor Driver (SSCNET Type)

Cycle the power for the parametersto be enabled. 00050002 * Please allocate pins CN1-13 separately. * See LECSS Operation Manual,section 5.4.2 for details on allocation of Output signals to pins CN1-9, CN1-13, CN3-15. -32- 6.5.4 I/O Signal Allocation Check The ON/OFF state (including layout check) and signal names allocated to CN3 can be checked.

IDX-OM-M051

oC 2 to 45 (Relative humidity 85% or less) Facility water pressure MPa 0.2 to 0.98 Facility water inlet temperature oC 5 to 40 50Hz 16 20.1 25 Standard conditions (ANR) Note 1) Air flow capacity m3/min 60Hz 18.8 23.7 30 50Hz 16.7 20.9 26 Air compressor suction condition Note 2) 60Hz 19.6 24.7 31.2 Inlet air pressure MPa 0.7 Rated Note 3) Inlet air temperature oC 40 Ambient temperature oC 32

IDX-OM-Z004

3.1 INOUT R INOUT 3.2 ONON IN OUT 5 IDF100150F-W 3.1 3 1 IDX-OM-Z004 3 ONOFF 0.05MPa 3.3 OFF OFF 3.4 3 3 5 3.5 OFF IDF100150F-W 3.3 3 2 IDX-OM-Z004 3 3.6 0 1 0 1 0 1 2 3 2 3 4 5 4 5 6 7 6 7 2 3 4 5 6 7 0 1 3 4 5 OFF OFF5.2 3 3 IDF100150F-W 3.6 3 3 IDX-OM-Z004 3 3.7 2A 80VA 100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02

IDX-OM-Y002

In most cases, cooling performance of the water-cooled condenser is deteriorated by the contamination of the cooling water of adhesion of scales. (2) Cooling Water Quality Standard 1 Water quality standard As a guideline for cooling water quality which does not cause abnormal level of contamination or scale, JRA-GL-02-1994 Guideline of Water Quality for Refrigeration and Air Conditioning

VF1000-OMP0001

-12 DXT031-44-1 M4X39.5 DXT031-30-2 VF330 VF333 DXT155-25-1 VF340 VF343 VF350 AXT620-32-1 M4X48 DXT156-9-8 VF520 DXT156-9-1 VF544 10 VF1000-OMP0001 R () P 11 VF1000-OMP0001 No. 1ISO VG 32 (R) 1. 2. 3. 4. 5. 6. 7. 12 VF1000-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Set flow rate range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Minimum set unit Note 1) 0.05 l/min 0.1 l/min 0.5 l/min 1 l/min Accumulated pulse flow rate exchange 0.05 l/pulse 0.1 l/pulse

Compact Vacuum Ejector Series ZQ

Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 2 Series ZQ Compact Vacuum Ejector How to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: NA (PROFIBUS DP - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 02 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate