19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.
Function plate (DXT060-32-4A) 6 Valve Functions Available by Changing of Piping Port 3 port N.C. 3 port N.O. 2 port N.C. 2 port N.O.
1 1.5m 1 Vacuum port direction Applicable size Applicable size Sym -bol Sym -bol 3m 3 3m 3 Type Type 16 16 25 25 32 32 40 40 5m 5m 5 5 Step motor (Servo24VDC l Step motor (Servo24VDC l Left side Nil Left side Nil Controller option Right side R Right side R Servo motor DC24V Servo motor DC24V Without controller Without controller Nil Nil A A With controller (NPN) 6N With controller (NPN
depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122
(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.
10 J 28 27 3 0 +0.030 , depth 1.5 4 6 10 9.5 Section AA 3 0 +0.030 , depth 1.5 Q QL Mounting datum level D B MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 DL 6 x M3 x 0.5, depth 4 2 x M3 x 0.5, depth 3.5 15 15 -X (mm) Individual -X G H J K L M N Q QL S V W Z Model MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20
MainParts Metallic vz1 I 1-OOO DXT192-32-1 DXT192-7-1 1 3 x 1 ' t x 1 AXT500-17 O Prsh rod (D o o Aluminum'NBR Metallic ie hcluding armatwe ass y xzinc die cast is used on 3position x xAl(rninum s usd on 3position How To Orilerl Connector Ass'U How To Order A{e -TFor 2 valve DXT170Led rdle cdor For 3 position valve TlBtueiBl"e tlalned STGray/Gray 4TRed/B-r.ck 'Speoialorder stdAO : 3' std.
MainParts Metallic vz1 I 1-OOO DXT192-32-1 DXT192-7-1 1 3 x 1 ' t x 1 AXT500-17 O Prsh rod (D o o Aluminum'NBR Metallic ie hcluding armatwe ass y xzinc die cast is used on 3position x xAl(rninum s usd on 3position How To Orilerl Connector Ass'U How To Order A{e -TFor 2 valve DXT170Led rdle cdor For 3 position valve TlBtueiBl"e tlalned STGray/Gray 4TRed/B-r.ck 'Speoialorder stdAO : 3' std.
4 inch face seal, 1/2, 3/4 inch tube weld 3.
Auto switch model Perpendicular Load voltage Lead wire length (m) Indicator light Wiring (Output) Special function Electrical entry Applicable load Pre-wired connector Type In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) DC AC 32 to 100 20, 25 32 to 100 20, 25 M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet Reed switch Solid state
L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4
3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27
error occurred. -65No.EX-OMN0028-B System diag.3 7 6 5 4 3 2 1 0 Byte 9 Bit No.
holes) 34 4 34 4 (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) (Mounting hole pitch) A A 24 24 P R P R 34.7 34.7 (Lead wire length) 300 65.5 51.9 55.9 [57.2] (Lead wire length) 44.5 62.1 [68.6] 300 21 32 38.6 44.5 49.5 [56] 48.1 48.1 32 21 8.5 8.5 6 6 42 17 9 17 9 15 3-Rc (PT)1/8 15 (Piping port) 24 42 24 32 32 3-Rc (PT)1/8 (Piping port) [ ] for AC Other dimensions
System diagnostic status1 7 6 5 4 3 2 1 0 Byte 1 Bit No.
0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !3 CL u !4 !6 CL1 !7 !5 MLGC CNG e ^0 ^2 !
Note 3) In the case of VZ120, supply air to 3 (R) port and exhaust from 1(P) port.
(inch) 1 8 1 2 3 8 5 32 3 16 5 16 1 4 One-touch Inch-size tubing/UNF, NPT thread connection Possible to use in vacuum to 100kPa UNF 10-32 Nylon 1 16 One-touch Mini Series KJ Soft nylon 1 8 Polyurethane Unions Applicable area U.S.A. etc.
Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.