M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

Rotary Actuator/Vane Style Series CRB2

C1=C (mm) D1= Y L2 max D2 Size (mm) 10 L1 max X D1 Size 2 to 8 Y-1 3 C1 L1= 10 15 4 to 14 X-3 3 3 to 9 Y-1.5 3 to 4 Y= C2 L2= 15 20 5 to 18 X-4 3 to 4 3 to 10 Y-1.5 3 to 5 X= D2= 20 30 6 to 20 X-4.5 3 to 5 3 to 13 Y-2 3 to 6 C2=C 30 40 6 to 22 X-5 3 to 6 6 to 15 Y-4.5 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male

HRX-OM-W058

OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option T [High-pressure pump]. 6-3 6.4.1 Option T [High-pressure pump] . 6-3 6.5 Option V

A_HEC-OM-K001

V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.

JXCx-OMY0004

Refer to 6.Details of Power supply plug (P.24) for wiring.

13

24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU ZL 15.8 12 31.5 32.8 12 27 35 12 ZY 15.8 12 31.5 32.8 12 27 35 12 One-touch and screw-in connection Model A 58.5 41.5 29.5 6 12.8 3.2 12 58.5 41.5 29.5 6

SZ3000

One-touch fitting assembly for 4 One-touch fitting assembly for 6 One-touch fitting assembly for 4 (Elbow type) One-touch fitting assembly for 6 (Elbow type) One-touch fitting assembly for 4 (Long elbow type) One-touch fitting assembly for 6 (Long elbow type) M5 port block assembly One-touch fitting assembly for 6 One-touch fitting assembly for 8 One-touch fitting assembly for 6 (Elbow type

Slide Unit Series CX2/CXWM/CXWL

Note 2) 2 magnets for auto switches are equipped to the magnet mounting block. 516 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL Operating Range (mm) Auto switch model Applicable cylinder size 10 16 20 25 32 Housing mounting D-A7/A80 D-A7H/A80H D-A73C/A80C 6 6 6 6 Plate mounting 6 D-E7A/E80A Housing mounting 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F

Electric Rotary Table

force (N) Stroke/both sides (mm) Size Stroke/both sides (mm) Size Size Size Basic Compact 4 6 10 14 22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data

Slide Unit Series CX2/CXWM/CXWL

Note 2) 2 magnets for auto switches are equipped to the magnet mounting block. 516 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL Operating Range (mm) Auto switch model Applicable cylinder size 10 16 20 25 32 Housing mounting D-A7/A80 D-A7H/A80H D-A73C/A80C 6 6 6 6 Plate mounting 6 D-E7A/E80A Housing mounting 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

JXCx-OMU0004

24 12 6 *20%F.S.

EXxx-OMY0004

See Section 6 Valve Manifold.

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

SMC CORPORATION OF JAPAN

. 6-6 6.8.5 To Edit Time Switches . 6-6 6.8.6 To Delete Time Switch Data . 6-6 6.9 The COUNTER Block . 6-7 6.10 The UP/DOWN COUNTER Block . 6-7 6.11 The COMPARE Block . 6-8 6.12 The OFFSET Block . 6-8 6.13 The DISPLAY Block . 6-9 6.13.1 Displaying Data Onscreen . 6-9 6.13.2 Editing Data Onscreen . 6-9 6.14 The ZONE COMPARE Block .6-10 6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6

AC Servo Motor Driver (CC-Link Type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Rotary Actuator/Vane Type

D2 = CB = C X = [mm] Size CRB2, CRBU2 Y L2 max D2 10 2 to 8 Y-1 3 [mm] Size CRB2 CRBU2 X L1 max D1 X L1 max D1 10 4 to 14 X-3 3 2 to 14 X-1 3 15 5 to 18 X-4 3 to 4 3 to 18 X-1.5 3 to 4 20 6 to 20 X-4.5 3 to 5 3 to 20 X-1.5 3 to 5 30 6 to 22 X-5 3 to 6 3 to 22 X-2 3 to 6 15 3 to 9 Y-1.5 3 to 4 20 3 to 10 Y-1.5 3 to 5 30 3 to 13 Y-2 3 to 6 40 6 to 15 Y-4.5 3 to 8 86 Simple Specials CRB2 Series

VQ5000

Coil voltage 1.Type of actuation 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC 1 2 3 4 5 6 1 2 3 4 5 6 2. Seal type 5. Light/Surge voltage suppressor Nil E With Without Metal seal Rubber seal 0 1 3. Function 6.

Compact Type Dual-Rod Cylinder Series CXSJ

Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

thread depth 3.5 3.8 7 Bottom view of MXQ8-30 132214.6 K 3.8 7 27 23 6 4 23 Z ZZ G (NN 1) x H H 12.5 12.5 5.7 5.7 A B 3.2 3.2 6.5 7 7 14 1 3H9 ( ) depth 3 +0.025 0 A B 4 3H9 ( ) depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13