Cylinder Port: TF (G), Arm Opening Angle: 120°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A020 (25mm Offset Machined ref NAAMS ACA020M)

Cylinder Port: NPT, Arm Opening Angle: 135°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A010 (Straight Machined ref NAAMS ACA010M)

Cylinder Port: TF (G), Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A007 (Straight Machined ref NAAMS ACA007M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A016 (20mm Offset Plain ref NAAMS ACA016M)

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A020 (25mm Offset Machined ref NAAMS ACA020M)

Cylinder Port: TF (G), Arm Opening Angle: 105°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A015 (20mm Offset Plain ref NAAMS ACA015M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A007 (Straight Machined ref NAAMS ACA007M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A025 (65mm Offset Plain ref NAAMS ACA025M)

Cylinder Port: NPT, Arm Opening Angle: 90°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: D (Mounting Position D), R Arm Style: A024 (25mm Offset Machined ref NAAMS ACA024M)

Cylinder Port: TF (G), Arm Opening Angle: 135°, Arm Position: R (Right Side), Switch Type: P (P & F), R Arm Mtg Position: A (Mounting Position A), R Arm Style: A016 (20mm Offset Plain ref NAAMS ACA016M)

1

Voltage drops at the value of r x I. PS1000, PS1100 Caution 1 to 5 [V] Current I Lead wire resistance r The load current range for a PS1000 and PS1100 is between 5 [mA] to 40 [mA]. If 40 [mA] is exceeded the output transistor could be damaged. Besides, do not connect a PLC, which can detect 1 [mA], since there is a leak current of 1 [mA] in OFF state.

ZSE30/ISE30

Pressure Switch Specifications ZSE30 (Vacuum/Low pressure) 100.0 to 100.0 kPa 101.0 to 101.0 kPa 500 kPa 0.2 kPa ISE30 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 MPa Rated pressure range Regulating pressure range Proof pressure Min. regulating unit Fluid Power supply voltage Current consumption Switch output Air, Inert gas, Non-flammable gas 12 to 24 VDC, Ripple (p-p

VXP21/22/23

r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A to 25A 32A to 50A Stainless steel, Silver Stainless steel, Copper, NBR Polyacetal PTFE Class B molded 15A to 25A Core assembly y Stainless steel, FKM

VZ1000

Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

OMS0020

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

JSY1000/3000/5000 Series (Non Plug-in)

Leakage voltage Caution Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as 3% or less of the rated voltage. 3.

3 Port Air Operated Valve

For more than 6 stations, supply air from both P ports on. For common exhaust type, exhaust from both R ports. 2. P and R ports can be 3/8 by mounting the optional mounting bracket to the manifold base. Mounting When mounting valves on the manifold base, the mounting orientation is decided. If it is mounted in the wrong direction, connected equipment may malfunction.