90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

13

12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

HRL

HRL A 40 100 Cooling capacity DI option Cooling method CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW Nil CH2 With electric conductivity control D1 CH1, CH2 With electric conductivity control A Air-cooled refrigeration Pipe thread type Power supply Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) 40 3-phase 380 to 415 VAC (50/60 Hz) 3-phase 460 to 480

Thermo-con/Rack Mount Type

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

CEx-OMB0060

Use a finger only with a force of less than 10N. 7-3. Counter operation 7-3-1. Handling data range Data range of the counter inside is between-7,999,999 to + 7,999,999. If a value in the counter is out of the range, it displays F and stops counting (For over + 8,000,000, it displays F and displaysF for below-8,000,000. -F is displayed with the decimal point already set).

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

ZS-33-D ZS-33-F D NPN Analog 4 to 20 mA E PNP Analog 1 to 5 V Analog 0 to 10 V*3 + ZS-33-D F PNP Analog 4 to 20 mA *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

ChemicalThermo-con

Circulating fluid HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products Wetted parts material PFA Operating pressure Note 3) 0 (atmospheric pressure) to 0.35 MPa Tube size (PFA tube) 1/2" x 3/8" 1/2" x 3/8" 1/2" x 3/8" 3/4" x 5/8" 3/4" x 5/8" 3/4" x 5/8" 50 to 95 F (10 to 35C) (no condensation) Temperature Wetted parts material FEP , Stainless steel 304, Stainless steel 316 Facility

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

3 !7 w !8 !4 !3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

PSE20xA.eng

Other parameter settings Front protective cover (Model: ZS-26-01) Normal operation mode Item Default setting Item Default setting [F80] Power saving mode OFF [F 3] Digital filter setting [F 4] Auto-preset function [F 5] Auto shift setting [F 6] Fine adjustment of display value 0.00 sec.

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Lightweight and Compact

G1, Symbol N: NPT1) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Pump capacity Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, PTFE, FKM, EPDM, PVC, NBR, POM, PE, PP, Carbon, Ceramic Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) 3-phase 380 to 415 VAC

CEx-OML0058

I s i t p o s s i b l e f o r c a b l e o f I s t h e a n y i n f l u e n c e s t r o k e re a d i n g c y l i n d e r t o o f n o i s e ? b e w i r e d s e p a r a t e l y f r o m t h e p o w e r l i n e ? t h e p o w e r l i n e ?

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

EXxx-OMV0017-D

Introduction . 3 1.1 About the I/O Configurator (NFC version) . 3 1.2 SMC wireless system (system configuration) . 4 1.3 About this manual . 5 2.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Temperature characteristics (25C standard) 3% F .S. 5% F .S. Output type Select from NPN or PNP open collector output.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 4 (A) JIS symbol 3 position closed center (A) 4 (B) 2 2 (B) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center with back pressure check valve 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 3 position closed center/exhaust

HRX-OM-W069

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-

Fieldbus system EtherCAT compatible SI Unit

010 V 4 05 V 080E 5 15 V 6 020 mA 7 420 mA 0 C(Celsius) 080F 1 F(Fahrenheit) 4 2 wires 0810 5 3 wires 6 4 wires 0 Direct(No Swap) 1 Swap 16bit 0811 2 Swap 32bit 3 Swap all 0 Deactivated 1 IOL_Manual 0812 2 IOL_Autostart 3 DI_C/Q 4 DO_C/Q 0 No Device check 1 Type compatible Device V1.0 0813 2 Type compatible Device V1.1 3 Type compatible Device V1.1 , Backup + Restore 4 Type compatible Device

1.1

W (-A) (990) Refrigerant high pressure gauge (595) Facility water outlet Rc 3/4 Facility water inlet Rc 3/4 Y-strainer 3/4 (Accessory) Display panel Technical Data Related Products (1300) (51) Eye bolt M12 Automatic water supply port Rc 1/2 Circulating fluid outlet Rc 3/4 (133) Circulating fluid return port Rc 3/4 Ventilation hole (19) By-pass valve (442) Circulating fluid pressure gauge