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URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PS-OMT0003

product catalogue or SMC website (URL http://www.smcworld.com) for more information about the product specifications and outline dimensions. 7 Green 8 Yellow CH4_OUT1 Auto shift input DOWN button UP button 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown CH3_OUT1 CH2_OUT1 CH1_OUT2 CH1_OUT1 DC(-) DC(+) URL http://www.smcworld.com SET button Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OFF [F99] Reset to default settings [F80] Power saving mode OFF Perform the setting with the 3 step setting mode, simple setting mode and function selection mode.

Other Settings Peak / Bottom hold display Zero clear Key lock URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 To set each of these functions, refer to the SMC website (URL http://www.smcworld.com) for more detailed information, or contact SMC.

Elimination copy function. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.TQ0010298-OM003-A

1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 290 L/min 295 L/min 095 L/min 4.60 V 18.4 mA 70% 30% 280 L/min 284 L/min 084 L/min 4.20 V 16.8 mA 60% 40% 420 mA 15V [mA] [V] -76No.PF-OMJ0005CN-I Revision history E F [2016 9 ] G [2017 2 ] H : [2018 8 ] I : [2019 5 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 DIN rail is prepared by customer. DIN rail is not suitable for port size F02 (G1/4).

URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMJ0018-F

hold [oFF] OFF [F11] [AFL] Analogue output filter [ on] With filter [Eco] Power saving mode [oFF] Unused [F12] Lever [oFF] Unused [P in] Security code [F13] Power and output lead wire and connector [ALL] Setting of all functions [oFF] Unused [F98] URL http://www.smcworld.com [ in i ] Reset to the default settings [oFF] Unused [F99] Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

[May 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2019 SMC Corporation All Rights Reserved No.PF-OMO0005-F

78No.PF-OMO0004CN-E PFMB7201-C8 2x -79No.PF-OMO0004CN-E PFM7B7201-C8L 2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D : [2018 8 ] E : [2019 5 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

[H_1] Hysteresis of OUT1 10 25 50 100 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 PFMB7501 [P_2] Set value of OUT2 100 250 500 1000 Accessory PFMB7102 0.5 to 0.7 Nm M4 screws (4 pcs.)

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2018 SMC Corporation All Rights Reserved No.PF-OMP0002-H

M4 screws 2 OUT2/Analogue output/External input White 3 Blue DC(-) 4 Black OUT1 URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PF-OMS0004

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No. PF-OMK0004-F

PF-OMK0003CN-E Revision history E [September 2016] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2016 SMC Corporation All Rights Reserved No. PF-OMK0003CN-E

URL http://www.smcworld.com Troubleshooting Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the SMC website (URL http://www.smcworld.com) for more information about troubleshooting.

[August 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMN0005-E

Power and output lead wire and connector URL http://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Connector for sensor lead wire Lever Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved