The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD ASSY, 14-STA (SY), VALVE, SS5Y3 MANIFOLD SY3000, 1J, SS5Y3 OTHER SIZE RATING, 1.03617 lb

Swivels

Hex 1 Port 1 Port 2 B PS490102-4-4 3.14 2.73 1.20 .75 1/4-18 1/4-18 79.7 mm 69.4 mm 30.5 mm 19.0 mm NPTF NPTF Hex 1 Port 2 PS690102-6-6 3.39 2.88 1.29 .88 3/8-18 3/8-18 86.1 mm 73.2 mm 32.8 mm 22.2 mm NPTF NPTF Port 1 PS890102-8-8 3.76 3.17 1.49 1.12 1/2-14 1/2-14 95.6 mm 80.6 mm 37.8 mm 28.6 mm NPTF NPTF DIA PS1290102-12-12 4.10 3.43 1.76 1.38 3/4-14 3/4-14 104.2 mm 87.2 mm 44.6 mm 35.0

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Robotic cable only) Cable type Actuator side (14) (18) (Terminal no.)

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A M L1 L2 1 8 4 LL04-01 45 10 21.8 50.9 15 3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 Applicable tubing 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 12 10 14 56.8 58.5 57 9 14 17 12 16 21.8 55.9 57.9 52.9 1 4 3 8 1 4 LL08-02 LL08-03 LL10-02 8 68 77 89 14 12 17 59 60.7 62.7 19 14 17 14 16 23.3

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 14 17 12 34.9 36.9 31.9 16 9 21.8 35.8 37.5 36 12 10 14 1 4 3 8 1 4 8 L08-02 L08-03 L10-02 52 61 68 14 17 14 16 19 23.3 35.9 37.9 36.9 38 39.7 40.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

CNS

19 14 190 100 230 155 16 Up to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 180 18.5 Up to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 215 Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 303 20 23 110 432 87.5 85.5 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 343 20 28 110 472

Pin Clamp Cylinders

and port. * The figures below indicate the CKU32-lRAL-X2321. 14.50.1 14.50.1 (29) 27 70 D d Q Q 0 0.05 120 K C SR 87.5 45 15.5 14.5 26 (4) MK 8 to 10 Diamond cut shape (Guide pin dia.: 9.5 or more) 30 MK2T 490.1 5 (6.4) CK1 14 14 590.05 CLK2 (188.5) 2 x 6H7 through +0.012 0 CLKG 5.5 59 4 x 6.6 through 18 CKQ CLKQ Clamp arm position CK CLK CK CLK A Same as the port side B Opposite side of

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14 240 200 160 120 80 40

NCA1

(5") 1.000 3/4-16 1.13 1.500 1.280 .750 5.50 1/2 NPT .63 4.50 .94 .95 2.88 2.75 2.500 1.38 7.75 600 (6") 1.375 1-14 1.63 2.000 1.530 1.000 6.50 3/4 NPT .75 5.00 1.31 1.32 3.13 3.25 3.000 1.63 8.88 800 (8") 1.375 1-14 1.63 2.000 1.530 1.000 8.50 3/4 NPT .75 5.13 1.31 1.32 3.25 4.25 3.000 1.63 9.00 Note: Pivot and cotter pins are included.

EXxx-OMN0037CN

13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11

Fieldbus system Analog unit

to 10 V -5 to 5 V -20 to 20 mA 7FFF 7FFF 32767 10.5 5.25 21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB -23No.EX-OMN0038-C

AMD

-20-55 to 14-20-57. 14-20-28

90

) With DIN rail mounting bracket Note 11) Note 14) Kit consists of the end plates for both ends and tension bolts.

AFF

-20-14

AMF

Refer to Flow Characteristics (page 14-20-44) and figure of Max. Air Flow (page 14-20-45).