Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

uid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic uid ll system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side uid temperature C 5 to 35 Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel

Hard Polyurethane Tubing, TUH Series

Burst Pressure Characteristic Curve and Operating Pressure How to Order TUH0644 B 20 5 4 Bundle length Burst pressure MPa Tubing model Length 20m bundle 100m bundle Symbol 20 100 3 2 Color Maximum operating pressure 1 Symbol B W BU N Color Black White Blue Translucent 0 -20 0 20 40 60 Operating temperature C F = (1.8 x C) + 32 1MPa = 145 psi 2 High Pressure Type Series TUH Hard Polyurethane

EXxx-OMO0027

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2/2 channels) (2 byte/1 channel) (2 byte/1 channel) -62No.EX-OMO0027

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

IDX-OM-W089

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term

Fieldbus system EtherNet/IP TM compatible SI unit

EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 byte/1 channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 byte/1 channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 byte/1 channel) 4 (2

EXxx-OMN0027CN

0.70.8 Nm (EX600-ZMA2) (EX600-ZMB2) (3)DIN DIN (4)DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm DIN DIN (EX600-ZMA2) 6 -14No.EX-OMN0027CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180 (1) (2) (3) A B C (EX600-ZT1) -15No.EX-OMN0027CN-D SI EX600-S A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

EXxx-OMN0035CN

DIN (SY SY ) (1) 6 ,2 (M4X5)DIN (EX600-ZMB2) EX600 0.70.8 Nm (2)2 M4X14EX600-ZMA2 0.70.8 Nm (3)DIN DIN (4)DIN DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm -13No.EX-OMN0035CN-A M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C D-sub (1) (2) (3)2 0.6 Nm -14No.EX-OMN0035CN-A -15No.EX-OMN0035CN-A () 2.5 mm0.4 mm 0.081.5 mm 2(AWG1628) 56 mm EX600-ZT1 -16No.EX-OMN0035CN-A

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20

High Vacuum L Type Valve

SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

CEx-OMQ0013

b. 2585%RH c. d e. 6. f. g. ( ) h. i. 7. j. k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5.

Low-Speed Rotary Actuator

During uniform acceleration, the angular acceleration after t seconds can be found as follows. t ( 1 ) 2 1 ( 2 ) C t tdt 2 When 0 t , rotation angle =0, so the integration constant is C=0. t t 2 1 2 1 2 thus, 2 t -28- Auto switch The rotary actuator has a magnet mounted on its piston and an auto switch on the outside of the body to detect the piston position (table position).

Rotary Table: High Precision Type

0.6 1.5 0.4 1 0.5 0.2 0 0 0. 0. 0. 0. 0. 0. 0. 0. 0. 1 0 1 2 3 4 5 6 7 8 9 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) Operating pressure (MPa) 22 - Date 2 C Calculation formulae for moment of inertia I: Moment of inertia [ kgm ] m: Load mass [ kg ] 2 1.

VS7-6

Blank plate (Air filter, Regulator) Manifold blocks necessary for mounting 2 2 2 2 2 2 2 1 F.

High Vacuum L Type Valve

when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83

SI Unit for Vacuum Manifold

Table. 3-2 Overview of modules for the SI Unit Occupied bytes Allowable slot Note Input Output Module Selected head module EX260-VPN1 ( 4) EX260-VPN1 ( 8) 2 bytes 2 bytes Vacuum / Release Vacuum / Release Refer to Section 5.1.

Wedge Cam Operation Gripper Series MHK2

P3318113-2 P3318105 P3318105-1 P3318105-2 Note 2) 20 Dust cover Note 2) Note 2) Note 1) No. 16 to 19 is supplied in one unit for KT-packing set.

High Vacuum L Type Valve

7 Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75

XL-OMY0001

100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55