VHK

Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Electric Actuator/Rod Type Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEY16, 25, 32 Series LEY How to Order LEY 16 30 B 1 1 6N S q w e r t y u i o !0 !1 !2 !

ZSE80/ISE80

D ZS-24-A ZS-24-D ZS-35-A ZS-35-C ZS-35-B ZS-35-F ZS-35-E Rear ported Rear ported Bottom ported Rear ported Bottom ported Rear ported Bottom ported Bracket ZS-35-F Panel mount Bottom ported Rear ported Panel mount + Front protection cover Note) Rear ported only 732

VXD

B Grommet 100 VAC With surge voltage suppressor 12 One-touch fitting C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C.

DM

Barb cassette creeps into the direction D and the tube will be clamped at the B clamp portion (5) consisting of barb (3) and case.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

AFJ20 to AFJ40

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size Option a Mounting Nil Without mounting option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

Soft start up valve with lock out

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

Pin Clamp Cylinder C(L)KQG32 Series Compact Cylinder Type 32 How to Order Clamping height LOW type KQG C X2081 B L 32 075 R A L C X2082 KQG C Clamping height HIGH type B L 32 075 R A H C Number of auto switches Nil 2 pcs. S 1 pc.

CRA1

2 Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 How to Order Mounting style Basic style Foot style B L Rotating angle 90 180 Rod end shape 90 180 Double shaft CRA1 B W 30 90 Size 30 CRA1 B S 50 90 Size 50 to 100 Mounting style Air cushion None With air cushion Nil C B L Basic style Foot style Flange style F For part numbers, refer to the tables below.

CVJ3

DC specifications AC specifications (50/60 Hz) Magnet installed even without auto switch 1 2 3 4 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Auto switch mounting Rail mounting style Band mounting style Symbol A B Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

B dimension is 133 mm. Applicable example 2

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

21- AF-A 10- Series Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard:Selectoneeachfora to e. Option/Semi-standardsymbol:Whenmorethanonespecificationisrequired,indicateinalphanumericorder.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

type y Stroke [mm] Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1200 1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

A 10 B 15 C 20 Produced upon receipt of order (Robotic cable only) Refer to the specications Note 2) on pages 9 and 10.

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

No anchor bolt is included. 166 B

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/ Rod Type Dust-tight/Water-jet-proof (IP65 Equivalent) LEY-X5 (Made to Order) Series LEY25, 32

How to Order 6N 1 1 D B 25 50 LEY X5 R o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

Valve Replacement Parts: Pilot Valve

Replacement pilot valve for the JSY3000/5000 b-side pilot valve 2 Pilot valve mounting screw (M2 x 16.5) Tightening torque: 0.15 Nm B tight flat head screw (M1.7) Tightening torque: 0.12 Nm 2 Pilot valve mounting screw (M2 x 25) Tightening torque: 0.15 Nm Loosen B tight at head screw to remove the pilot cover in the direction indicated by the arrow q.

Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1